Multilayer growth in the APS rotary deposition system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6705, Issue , 2007, Pages

  Conley, Ray ^a   Liu, Chian ^a   Kewish, Cameron M ^a   Macrander, Albert T ^a   Morawe, Christian ^b  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

Deposition; Multilayer; Optics; Sputter; Thin film; X ray

Indexed keywords

FLAT-TOP REFLECTIVITY; REFLECTIVE OPTICS; ROTARY DEPOSITION;

BANDPASS FILTERS; DEPOSITION; FILM GROWTH; FILM THICKNESS; MICROFABRICATION; THICK FILMS; X RAY OPTICS;

MULTILAYERS;

EID: 42149180717     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.736024     Document Type: Conference Paper

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