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Volumn 34, Issue 1, 1995, Pages 201-208

Calculation of the power spectral density from surface profile data

Author keywords

Beryllium; Power spectral density; Surface profiles

Indexed keywords

BERYLLIUM; CURVE FITTING; DENSITY MEASUREMENT (OPTICAL); FAST FOURIER TRANSFORMS; FREQUENCIES; GRAPHIC METHODS; LIGHT SCATTERING; OPTICAL PROPERTIES; SPECTRUM ANALYSIS; SURFACE MEASUREMENT; SURFACE ROUGHNESS; SURFACES;

EID: 0029184354     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.34.000201     Document Type: Article
Times cited : (299)

References (10)
  • 1
    • 84893886018 scopus 로고    scopus 로고
    • Optics and optical instruments-indications in optical drawings
    • (International Organization for Standardization, ISO/TC 172/SC l/WG 2, Geneva, Switzerland)
    • "Optics and optical instruments-indications in optical drawings," in Draft International Standard ISO 10110 Part 8: Surface Texture (International Organization for Standardization, ISO/TC 172/SC l/WG 2, Geneva, Switzerland).
    • Draft International Standard ISO 10110 Part 8: Surface Texture
  • 3
    • 0002077292 scopus 로고
    • The optimal estimation of finish parameters
    • J.C. Stover, ed., Proc. Soc. Photo-Opt. Instrum. Eng
    • E. L. Church and P. Z. Takacs, "The optimal estimation of finish parameters," in Optical Scatter: Applications, Measurement, and Theory, J. C. Stover, ed., Proc. Soc. Photo-Opt. Instrum. Eng. 1530, 71-78(1991).
    • (1991) Optical Scatter: Applications, Measurement, and Theory , vol.1530 , pp. 71-78
    • Church, E.L.1    Takacs, P.Z.2
  • 4
    • 0018443213 scopus 로고
    • Relationship between surface scattering and microtopographic features
    • E. L. Church, H. A. Jenkinson, and J. M. Zavada, "Relationship between surface scattering and microtopographic features," Opt. Eng. 18, 125-136(1979).
    • (1979) Opt. Eng , vol.18 , pp. 125-136
    • Church, E.L.1    Jenkinson, H.A.2    Zavada, J.M.3
  • 5
    • 0018295278 scopus 로고
    • Relation between the angular dependence of scattering and the statistical properties of optical surfaces
    • J. M. Elson and J. M. Bennett, "Relation between the angular dependence of scattering and the statistical properties of optical surfaces," J. Opt. Soc. Am. 69, 31-47 (1979).
    • (1979) J. Opt. Soc. Am , vol.69 , pp. 31-47
    • Elson, J.M.1    Bennett, J.M.2
  • 6
    • 0027639004 scopus 로고
    • Wavelength and angular dependence of light scattering from beryllium: Comparison of theory and experiment
    • see also references by Church et al. in this reference
    • J. M. Elson, J. M. Bennett, and J. C. Stover, "Wavelength and angular dependence of light scattering from beryllium: comparison of theory and experiment," Appl. Opt. 32, 3362-3376 (1993); see also references by Church et al. in this reference.
    • (1993) Appl. Opt , vol.32 , pp. 3362-3376
    • Elson, J.M.1    Bennett, J.M.2    Stover, J.C.3
  • 10
    • 0003474751 scopus 로고
    • For example, a commercial algorithm in 2nd ed. (Cambridge U. Press, New York). called SPCTRM.FOR yields smoothed PSD estimates that are one sided
    • For example, a commercial algorithm in W. H. Press, S. A. Teukolsky, W. T. Vettering, and B. P. Flannery, Numerical Recipes in Fortran, The Art of Scientific Computing, 2nd ed. (Cambridge U. Press, New York, 1992), pp. 543-551. called SPCTRM.FOR yields smoothed PSD estimates that are one sided.
    • (1992) Numerical Recipes in Fortran, The Art of Scientific Computing , pp. 543-551
    • Press, W.H.1    Teukolsky, S.A.2    Vettering, W.T.3    Flannery, B.P.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.