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Volumn 49, Issue 9, 2010, Pages

Spatially resolved height response of phase-shifting interferometers measured using a patterned mirror with varying spatial frequency

Author keywords

Height response; Interferometry; Spatial frequency

Indexed keywords

CIRCULAR FIELD OF VIEWS; FIELD OF VIEWS; HEIGHT RESPONSE; PASS BANDS; PERFORMANCE EVALUATION; PHASE-SHIFTING INTERFEROMETERS; SMOOTH SURFACE; SPATIAL FREQUENCY; SPATIALLY RESOLVED; SPECTRAL RESPONSE; SUB-PATTERNS; SURFACE UNDER TESTS;

EID: 80054062002     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.3488052     Document Type: Article
Times cited : (15)

References (11)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.