Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry

Applied Optics

Volumn 44, Issue 28, 2005, Pages 5919-5927

  Rhee, Hyug Gyo ^a   Vorburger, Theodore V ^a   Lee, Jonathan W ^a   Fu, Joseph ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; LIGHT; PARAMETER ESTIMATION; SURFACE ROUGHNESS;

SKEWING EFFECTS; WHITE-LIGHT INTERFEROMETRY;

PHASE SHIFT;

EID: 28044466189     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.005919     Document Type: Article

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