Wear of single crystal silicon as a function of surface roughness

Wear

Volumn 254, Issue 9, 2003, Pages 907-910

  Gatzen, H H ^a   Beck, M ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

Pin on disk test; Surface roughness; Three body contact; Wear of silicon

Indexed keywords

INTERFACES (MATERIALS); MICROACTUATORS; SINGLE CRYSTALS; SURFACE ROUGHNESS; TRIBOLOGY;

PICOINDENTER;

WEAR OF MATERIALS;

EXPERIMENTAL STUDY; SILICON; SURFACE ROUGHNESS; TRIBOLOGY; WEAR MEASUREMENT;

EID: 0038507661     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(03)00245-X     Document Type: Article

References (5)

1. Tai Y.C.Muller R.S.IC-processed electrostatic synchronous micromotors Sens. Actuators 20 1989 49-55
2. Föhse M.Kohlmeier T.Gatzen H.H.Thinfilm technologies to fabricate a linear microactuator Sens. Actuators A91 2001 145-149
3. Machcha A.R.Azarian M.H.Talke F.E.An investigation of nano-wear during contact recording Wear 197 1996 211-220
4. Gatzen H.H.Maetzig J.C.Nanogrinding Precision Eng. 21 1997 134-139
5. H.H. Gatzen, M. Beck, Tribological Investigations on Micromachined Silicon Sliders, TISD, Sendai, Japan, 2001, Tribology International 36 (2003) 279-283.