A micromachined friction meter for silicon sidewalls with consideration of contact surface shape

Journal of Micromechanics and Microengineering

Volumn 16, Issue 11, 2006, Pages 2475-2481

  Hwang, Il Han ^a   Lee, Yong Gu ^a   Lee, Jong Hyun ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; MICROMACHINING; REACTIVE ION ETCHING; SPRINGS (COMPONENTS);

BEAM SPRINGS; CONTACT WIDTHS; FRICTION COEFFICIENTS;

FRICTION METERS;

EID: 33750586665     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/11/031     Document Type: Article

References (19)

1. Akiyama T, Collard D and Fujita H 1997 Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS J. Microelectromech. Syst. 6 10-7
2. Tas N, Wissink J, Sander L, Lammerink T and Elwenspoek M 1998 Modeling, design and testing of the electrostatic shuffle motor Sensors Actuators A 70 171-9
3. Yeh R, Hollar S and Pister K S J 2002 Single mask, large force, and large displacement electrostatic linear inchworm motors J. Microelectromech. Syst. 11 330-6
4. Lim M G, Chang J C, Schultz D P, Howe R T and White R M 1990 Polysilicon microstructures to characterize static friction Proc. IEEE MEMS pp 85-8
5. Lumbantobing A and Komvopoulos K 2005 Static friction in polysilicon surface micromachines J. Microelectromech. Syst. 14 651-63
6. Noguchi K, Fujita H and Suzuki M 1991 The measurement of friction on micromechatronics elements Proc. IEEE MEMS pp 148-53
7. de Boer M P, Luck D L, Ashurst W R, Maboudian R, Corwin A D, Walraven J A and Redmond J M 2004 High-performance surface-micromachined inchworm actuator J. Microelectromech. Syst. 13 63-74
8. Sundararajan S and Bhushan B 2001 Static friction and surface roughness studies of surface micromachined electrostatic micromotors using an atomic force/friction force microscope J. Vac. Sci. Technol. A 19 1777-85
9. Bhushan B and Dandavate C 2000 Thin-film and adhesion studies using atomic force microscopy J. Appl. Phys. 87 1201-10
10. Wang W, Wang Y, Bao H, Xiong B and Bao M 2002 Friction and wear properties in MEMS Sensors Actuators 97-98 486-91
11. Tas N R, Gui C and Elwenspoek M 2000 Static friction in elastic adhesive MEMS contacts, models and experiment Proc. IEEE MEMS pp 193-98
12. Hwang I-H and Lee J-H 2006 Novel measurement system of the friction coefficients for the DRIE sidewalls Proc. IEEE MEMS pp 210-3
13. Pratt R I, Johnson G C, Howe R T and Chang J C 1991 Micromechanical structures for thin film characterization Proc. IEEE MEMS pp 205-8
14. De S K and Aluru N R 2003 Physical and reduced-order dynamic analysis of MEMS ICCAD pp 270-3
15. 3OH for sacrificial oxide removal Sensors Actuators A 64 27-32
16. Hwang I-H, Yoon E-S and Lee J-H 2006 A micromachined reaction force actuator (RFA) for a nanomanipulator preparation J. Microelectromech. Syst. 15 492-7
17. Komvopoulos K 1996 Surface engineering and microtribology for microelectromechanical systems Wear 200 305-27
18. Bhushan B 2005 Nanotribology and nanomechanics Wear 259 1507-31
19. Jinesh K B and Frenken J W M 2006 Capillary condensation in atomic scale friction: how water acts like a glue Phys. Rev. Lett. 96 166103