Operational wear and friction in mems devices

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2004, Pages 207-209

  Subhash, Ghatu ^a   Corwin, Alex D ^b   Deboer, Maarten P ^b  

^a Michigan Technological University   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Friction coefficient; Nanotractor; Polysilicon; Wear cycling

Indexed keywords

CONDITION MONITORING; DRAG; FRICTION; MICROELECTROMECHANICAL DEVICES; PLASTIC DEFORMATION; POLYSILICON; REAL TIME SYSTEMS; SCANNING ELECTRON MICROSCOPY; SURFACES;

NANOTRACTOR; REAL-TIME PERFORMANCE; WEAR CYCLING; WEAR-TRACK;

WEAR OF MATERIALS;

EID: 21644487111     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-60986     Document Type: Conference Paper

References (1)

1. M.P. de Boer, D.L. Luck, W.R. Ashurst, R. Maboudian, A.D. Corwin, J.A. Walraven and J. M. Redmond, "High performance surface-micromachined inchworm actuator," Journal of Microelectromechanical Systems, Vol. 13, No. 1, 63-74 (2004).