Micromachined actuators with braking mechanisms

Sensors and Actuators, A: Physical

Volumn 122, Issue 1 SPEC. ISS., 2005, Pages 1-8

  Grade, John D ^a   Yasumura, Kevin Y ^b   Jerman, Hal ^b  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b Iolon Inc   (United States)

Author keywords

Brake; Comb drive; Electrostatic actuator; Friction; Large deflection

Indexed keywords

ADHESION; BRAKES; BRAKING; CAPILLARITY; ELECTRIC POTENTIAL; MICROMACHINING; NATURAL FREQUENCIES; ROTATING MACHINERY; STICTION; STIFFNESS; VIBRATIONS (MECHANICAL);

BRAKING MECHANISMS; COMB DRIVE; LARGE DEFLECTIONS; ROTARY ACTUATORS;

ELECTROSTATIC ACTUATORS;

EID: 22844443874     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.01.040     Document Type: Article

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