Deep-UVsensors based on SAW oscillators using low-temperature-grown AlN films on sapphires

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 58, Issue 8, 2011, Pages 1688-1693

  Laksana, Chipta P ^a   Chen, Meei Ru ^a   Liang, Yen ^a   Tzou, An Jyeg ^a   Kao, Hui Ling ^a   Jeng, Erik S ^a   Chen, Jyh Shin ^a   Chen, Hou Guang ^b   Jian, Sheng Rui ^b  

^a CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

^b I SHOU UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALN FILMS; CENTER FREQUENCY; DEEP-UV; DOMINANT WAVELENGTH; EPITAXIAL ALN; FREQUENCY DOWNSHIFT; HELICON SPUTTERING; HIGH QUALITY; LIGHT DETECTION; LOW GROWTH TEMPERATURE; REMOTE SENSORS; SA WFILTER; SAPPHIRE SUBSTRATES; SAW DEVICE; SAW OSCILLATORS; UV SOURCES;

ACOUSTIC SURFACE WAVE DEVICES; EPITAXIAL FILMS; REMOTE SENSING; SAPPHIRE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 80052059480     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2011.1997     Document Type: Article

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