메뉴 건너뛰기




Volumn 22, Issue 9, 2011, Pages

Thermal drift study on different commercial scanning probe microscopes during the initial warming-up phase

Author keywords

atomic force microscopy; distortions; scanning probe microscopy; thermal drift

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; DISTORTION (WAVES); HYDROPHOBICITY; SURFACE TOPOGRAPHY;

EID: 80051682087     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094016     Document Type: Article
Times cited : (41)

References (17)
  • 1
    • 55949092598 scopus 로고    scopus 로고
    • Advances in engineered surfaces for functional performance
    • Bruzzone A A G, Costa H L, Lonardo P M and Lucca D A 2008 Advances in engineered surfaces for functional performance CIRP Ann. 57 750-69
    • (2008) CIRP Ann. , vol.57 , Issue.2 , pp. 750-769
    • Bruzzone, A.A.G.1    Costa, H.L.2    Lonardo, P.M.3    Lucca, D.A.4
  • 2
    • 33750488169 scopus 로고    scopus 로고
    • Acquisition of high-precision images for non-contact atomic force microscopy
    • DOI 10.1016/j.mechatronics.2006.04.002, PII S095741580600064X
    • Pishkenari H N, Jalili N and Meghdari A 2006 Acquisition of high-precision images for non-contact atomic force microscopy Mechatronics 16 655-64 (Pubitemid 44646851)
    • (2006) Mechatronics , vol.16 , Issue.10 , pp. 655-664
    • Pishkenari, H.N.1    Jalili, N.2    Meghdari, A.3
  • 3
    • 70350671679 scopus 로고    scopus 로고
    • Geometrical modelling of scanning probe microscopes and characterization of errors
    • Marinello F, Bariani P, Carmignato S and Savio E 2009 Geometrical modelling of scanning probe microscopes and characterization of errors Meas. Sci. Technol. 20 084013
    • (2009) Meas. Sci. Technol. , vol.20 , Issue.8 , pp. 084013
    • Marinello, F.1    Bariani, P.2    Carmignato, S.3    Savio, E.4
  • 5
    • 34248208500 scopus 로고    scopus 로고
    • An atomic force microscope head designed for nanometrology
    • DOI 10.1088/0957-0233/18/6/S11, PII S0957023307341477, S11
    • Lu M, Gao S, Jin Q, Cui J, Du H and Gao H 2007 An atomic force microscope head designed for nanometrology Meas. Sci. Technol. 18 1735-9 (Pubitemid 46722493)
    • (2007) Measurement Science and Technology , vol.18 , Issue.6 , pp. 1735-1739
    • Lu, M.1    Gao, S.2    Jin, Q.3    Cui, J.4    Du, H.5    Gao, H.6
  • 7
    • 77952993274 scopus 로고    scopus 로고
    • Vertical and lateral drift corrections of scanning probe microscopy images
    • Rahe P, Bechstein R and Kühnle A 2010 Vertical and lateral drift corrections of scanning probe microscopy images J. Vac. Sci. Technol. B 28 C4E31
    • (2010) J. Vac. Sci. Technol. , vol.28 , Issue.3
    • Rahe, P.B.1
  • 11
    • 64849099754 scopus 로고    scopus 로고
    • Optimal design of high precision XY-scanner with nanometer-level resolution and millimeter-level working range
    • Kang D, Kim K, Kim D, Shim J, Gweon D G and Jeong J 2009 Optimal design of high precision XY-scanner with nanometer-level resolution and millimeter-level working range Mechatronics 19 562-70
    • (2009) Mechatronics , vol.19 , Issue.4 , pp. 562-570
    • Kang, D.1    Kim, K.2    Kim, D.3    Shim, J.4    Gweon, D.G.5    Jeong, J.6
  • 12
    • 43649098093 scopus 로고    scopus 로고
    • Design and input-shaping control of a novel scanner for high-speed atomic force microscopy
    • Schitter G, Thurner P J and Hansma P K 2008 Design and input-shaping control of a novel scanner for high-speed atomic force microscopy Mechatronics 18 282-8
    • (2008) Mechatronics , vol.18 , Issue.5-6 , pp. 282-288
    • Schitter, G.1    Thurner, P.J.2    Hansma, P.K.3
  • 13
    • 67349112084 scopus 로고    scopus 로고
    • Design and modeling of a novel 3-DOF precision micro-stage
    • Kim H S and Cho Y M 2009 Design and modeling of a novel 3-DOF precision micro-stage Mechatronics 19 598-608
    • (2009) Mechatronics , vol.19 , Issue.5 , pp. 598-608
    • Kim, H.S.1    Cho, Y.M.2
  • 14
    • 32044461813 scopus 로고    scopus 로고
    • Design of hysteresis-compensating iterative learning control for piezo-positioners: Application to atomic force microscopes
    • DOI 10.1016/j.mechatronics.2005.11.006, PII S0957415805001340
    • Leang K K and Devasia S 2006 Design of hysteresis-compensating iterative learning control for piezo-positioners: application to atomic force microscopes Mechatronics 16 141-58 (Pubitemid 43192024)
    • (2006) Mechatronics , vol.16 , Issue.3-4 , pp. 141-158
    • Leang, K.K.1    Devasia, S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.