A newly developed X-Y planar nano-motion table system with large travel ranges

Journal of Advanced Mechanical Design, Systems and Manufacturing

Volumn 4, Issue 5, 2010, Pages 976-984

  Kurisaki, Yugo ^a   Sawano, Hiroshi ^a   Yoshioka, Hayato ^a   Shinno, Hidenori ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Large travel range; Nano positioning; Non contact; Planar motion

Indexed keywords

AEROSTATIC BEARINGS; CENTER OF GRAVITY; FRAME STRUCTURE; LARGE TRAVEL; LASER INTERFEROMETER; MOTION MECHANISMS; MULTIPLE DEGREES OF FREEDOM; NANO-POSITIONING; NEW DESIGN; NON-CONTACT; NON-CONTACT CONDITIONS; PERFORMANCE EVALUATION; PLANAR MOTION; PRECISION MOTION CONTROL; SCIENTIFIC INSTRUMENT; SEMI-CONDUCTOR FABRICATION; SYSTEM-BASED; VOICE COIL MOTORS;

INTERFEROMETERS; LASER INTERFEROMETRY; MOTION CONTROL; PRECISION ENGINEERING;

AUTOMATION;

EID: 80051691811     PISSN: None     EISSN: 18813054     Source Type: Journal    
DOI: 10.1299/jamdsm.4.976     Document Type: Article

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