Thermal drift study on SPMs

Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010

Volumn 1, Issue , 2010, Pages 209-212

  Balcon, M ^a   Marinello, F ^a   Savio, E ^a   Carmignato, S ^a  

^a UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE RECONSTRUCTION; SCANNING PROBE MICROSCOPY; SURFACE TOPOGRAPHY; THERMOANALYSIS;

DRIFT ESTIMATIONS; HIGH-RESOLUTION IMAGING; HIGHEST RESOLUTIONS; IMAGING PROCESS; ITS EVALUATION; THERMAL DRIFTS; THERMAL PHENOMENA; TIME DEPENDENT PHENOMENA;

PRECISION ENGINEERING;

EID: 80051686833     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Marinello F., Bariani P., Carmignato S., Savio E., Geometrical modelling of scanning probe microscopes and characterization of errors, Measurement Science and Technology, 20/8, 084002, 2009.
2. Mokabery B., Requicha A.A.G., Towards Automatic Nanomanipulation: Drift Compensation in Scanning Probe Microscopes, IEEE ICRA Proc., 2004.
3. www.imagemet.com, plug-ins for SPIP™.