Fast technique for AFM vertical drift compensation

Measurement Science and Technology

Volumn 18, Issue 3, 2007, Pages 689-696

  Marinello, F ^a   Bariani, P ^b   De Chiffre, L ^c   Savio, E ^a  

^a UNIVERSITY OF PADOVA   (Italy)

^b Schaefer Italia SRL   (Italy)

^c TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

AFM; Reconstruction; Vertical drift

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER HARDWARE; IMAGE RECONSTRUCTION; SCANNING PROBE MICROSCOPY; SURFACE TREATMENT;

ORTHOGONAL SCANNING; VERTICAL DRIFT;

SURFACE TOPOGRAPHY;

ATOMIC FORCE MICROSCOPY; COMPUTER HARDWARE; IMAGE RECONSTRUCTION; SCANNING PROBE MICROSCOPY; SURFACE TOPOGRAPHY; SURFACE TREATMENT;

EID: 34247178480     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/3/019     Document Type: Article

References (12)

1. Garnæs J, Kofod N A, Nielsen C, Dirscherl K and Blunt L 2003 Calibration of step heights and roughness measurements with atomic force microscopes Precis. Eng. 27 91-8
2. Zhang H, Huang F and Higuchi T 1997 Dual unit scanning tunneling microscope-atomic force microscope for length measurement based on reference scales J. Vac. Sci. Technol. B 15 780-4
3. Jorgensen J F, Madsen L L, Garnaes J, Carneiro K and Schaumburg K 1994 Calibration, drift elimination, and molecular structure analysis J. Vac. Sci. Technol. 12 1698-701
4. Yaofeng S and Pang J H L 2006 AFM image reconstruction for deformation measurements by digital image correlation Nanotechnology 17 933-9
5. Bariani P 2005 Dimensional metrology for microtechnology PhD Thesis IPL-DTU
6. Bariani P, Marinello F and De Chiffre L 2005 True three-dimensional surface topography imaging with AFM Proc. 7th Lamdamap pp 286-92
7. Scanning Probe Image Processor (SPIP™), developed by Image Metrology A/S, www.imagemet.com
8. Blunt L and Stout K J 2000 Three-Dimensional Surface Topography (London: Penton Press)
9. Marinello F and Savio E 2007 Use of cylindrical artefacts for AFM vertical calibration Meas. Sci. Technol. 18 462-8
10. Brand U and Kirchhoff J 2005 A micro-CMM with metrology frame for low uncertainty measurements Meas. Sci. Technol. 16 2489-97
11. Küng A and Meli F 2005 Self calibration method for 3D roundness of spheres using an ultra-precision coordinate measuring machine Proc. 5th Int. Euspen Conf. pp 193-6
12. Orji N G, Vorburger T V, Fu J, Dixson R G, Nguyen C V and Raja J 2005 Line edge roughness metrology using atomic force microscopes Meas. Sci. Technol. 16 2147-54