Optimal design of high precision XY-scanner with nanometer-level resolution and millimeter-level working range

Mechatronics

Volumn 19, Issue 4, 2009, Pages 562-570

  Kang, Dongwoo ^a   Kim, Kihyun ^a   Kim, Dongmin ^a   Shim, Jongyoup ^a   Gweon, Dae Gab ^a   Jeong, Jaehwa ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Korea University   (South Korea)

Author keywords

Flexure mechanism; Optimal design; Precision scanner; Voice coil motor

Indexed keywords

MECHANISMS; NATURAL FREQUENCIES; OPTIMAL SYSTEMS; POSITION CONTROL;

DESIGN VARIABLES; FLEXURE MECHANISM; HIGH RESPONSE SPEED; MILLIMETER LEVELS; OPTIMAL DESIGN; OPTIMAL TRADEOFFS; PRECISION SCANNER; VOICE COIL MOTORS;

SCANNING;

EID: 64849099754     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2009.01.002     Document Type: Article

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