Optical and hydrophobic properties of co-sputtered chromium and titanium oxynitride films

Applied Surface Science

Volumn 257, Issue 21, 2011, Pages 8755-8761

  Rawal, Sushant K ^a   Chawla, Amit Kumar ^a   Jayaganthan, R ^a   Chandra, Ramesh ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY ROORKEE   (India)

Author keywords

Chromium oxynitride; Co sputtering; Contact angle; Optical properties; Strain; Stress; Titanium oxynitride

Indexed keywords

AMORPHOUS FILMS; ANGLE MEASUREMENT; CONTACT ANGLE; CRYSTALLITE SIZE; DEPOSITION RATES; ENERGY GAP; HYDROPHILICITY; HYDROPHOBICITY; MAGNETRON SPUTTERING; NITRIDES; OPTICAL PROPERTIES; REFRACTIVE INDEX; STRAIN; STRESSES; SUBSTRATES; TITANIUM COMPOUNDS; X RAY DIFFRACTION;

COSPUTTERING; GLANCING INCIDENCE X-RAY DIFFRACTIONS; OXYNITRIDES; REACTIVE RF MAGNETRON SPUTTERING; RESIDUAL STRESS AND STRAINS; STRUCTURAL AND OPTICAL PROPERTIES; TITANIUM OXYNITRIDE; TRANSMISSION AND ABSORPTION;

CHROMIUM COMPOUNDS;

EID: 79960198471     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.03.012     Document Type: Article

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