TiOxNy coatings grown by atmospheric pressure metal organic chemical vapor deposition

Surface and Coatings Technology

Volumn 205, Issue 5, 2010, Pages 1287-1293

  Maury, F ^a   Duminica, F D ^a  

^a UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

Atmospheric pressure CVD; Hard coatings; MOCVD; TiOxNy

Indexed keywords

AMORPHOUS TIO; ATMOSPHERIC PRESSURE CVD; DEPOSITION CONDITIONS; HIGH HARDNESS; LOW FRICTION COEFFICIENTS; METALLURGICAL COATINGS; METALORGANIC CHEMICAL VAPOR DEPOSITION; MOCVD; MOLE FRACTION; N CONTENT; NITROGEN SOURCES; OXYGEN PRECURSORS; PARTICULAR CONDITION; REACTIVE GAS; STRUCTURAL AND MECHANICAL PROPERTIES; TETRA-ISO-PROPOXIDE; TIO; TITANIUM OXYNITRIDE; UNLUBRICATED SLIDING; VARIOUS SUBSTRATES;

AMORPHOUS FILMS; ATMOSPHERIC CHEMISTRY; ATMOSPHERIC PRESSURE; ATMOSPHERICS; FRICTION; INDUSTRIAL CHEMICALS; MECHANICAL PROPERTIES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NITRIDES; NITROGEN; ORGANIC CHEMICALS; ORGANOMETALLICS; OXYGEN; PROTECTIVE COATINGS; STAINLESS STEEL; TITANIUM; WEAR RESISTANCE;

HARD COATINGS;

EID: 78649938805     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.08.112     Document Type: Article

References (37)

1. Bartella J., Schroeder J., Witting K. Appl. Surf. Sci. 2001, 179:181.
2. Zheng Y., Kikuchi K., Yamasaki M., Sonoi K., Uehara K. Appl. Opt. 1997, 36:6335.
3. Saito Y., Hirata M., Tada H., Hyodo M. Appl. Phys. Lett. 1993, 63:1319.
4. Wan C.F., Sulzbach F.C., Luttmer J.D. J. Vac. Sci. Technol., B 1992, 10:1658.
5. Ku Y.H., Lee S.K., Kwong D.L. Thin Solid Films 1989, 172:1.
6. Piscanec S., Colombi Ciacchi L., Vesselli E., Comelli G., Sbaizero O., Meriani S., De Vita A. Acta Mater. 2004, 52:1237.
7. Mohamed S.H., Kappertz O., Niemeier T., Drese R., Wakkad M.M., Wuttig M. Thin Solid Films 2004, 468:48.
8. Asahi R., Morikawa T., Ohwaki T., Aoki K., Taga Y. Science 2001, 293:269.
9. Duminica F.-D., Maury F., Hausbrand R. Surf. Coat. Technol. 2007, 201:9349.
10. Zywitzki O., Modes T., Sahm H., Frach P., Goedicke K., Glöß D. Surf. Coat. Technol. 2004, 180-181:538.
11. Chappe J.M., Gavoille J., Martin N., Lintymer J., Takadoum J. J. Mater. Sci. 2006, 41:5639.
12. Torres G.R., Lindgren T., Lu J., Granqvist C.-G., Lindquist S.-E. J. Phys. Chem. B 2004, 108:5995.
13. Suda Y., Kawasaki H., Ueda T., Ohshima T. Thin Solid Films 2004, 453-454:162.
14. Yang M.-C., Yang T.-S., Wong M.-S. Thin Solid Films 2004, 469-470:1.
15. Miao L., Tanemura S., Watanabe H., Mori Y., Kaneko K., Toh S. J. Cryst. Growth 2004, 260:118.
16. Miyauchi M., Ikezawa A., Tobimatsu H., Irie H., Hashimoto K. Phys. Chem. Chem. Phys. 2004, 6:865.
17. Ihara T., Miyoshi M., Iriyama Y., Matsumoto O., Sugihara S. Appl. Catal., B:Environmental 2003, 42:403.
18. Sarantopoulos C., Gleizes A.N., Maury F. Thin Solid Films 2009, 518:1299.
19. Guillot J., Chappe J.-M., Heintz O., Martin N., Imhoff L., Takadoum J Acta Mater. 2006, 54:3067.
20. Makino Y., Nose M., Tanaka T., Misawa M., Tanimoto A., Nakai T., Kato K. Surf. Coat. Technol. 1998, 98:934.
21. Martin N., Banakh O., Santo A.M.E., Spinger S., Sanjines R., Takadoum J., Levy F. Appl. Surf. Sci. 2001, 185:123.
22. Venkataraj S., Severin D., Mohamed S.H., Ngaruiya J., Kappertz O., Wuttig M. Thin Solid Films 2006, 502:228.
23. Martin N., Lintymer J., Gavoille J., Chappe J.M. Surf. Coat. Technol. 2007, 201:7720.
24. Jung C.K., Bae I.S., Song Y.H., Cho S.J., Boo J.H. Solid State Phenom. 2006, 111:151.
25. Fabreguette F., Imhoff L., Guillot J., Domenichini B., Marco de Lucas M.C., Sibillota P., Bourgeois S., Sacilottia M. Surf. Coat. Technol. 2000, 125:396.
26. Pradhan S.K., Reucroft P.J. J. Cryst. Growth 2003, 250:588.
27. Duminica F.-D., Maury F. Surf. Coat. Technol. 2008, 202:2423.
28. Duminica F.-D., Maury F., Senocq F. Surf. Coat. Technol. 2004, 188-189:255.
29. Maury F., Duminica F.-D., Senocq F. Chem. Vap. Deposition 2007, 13:638.
30. Scott D.W., Oliver G.D., Gross M.E., Hubbard W.N., Huffman H.M. J. Am. Chem. Soc. 1949, 71:2293.
31. CRC Handbook of Chemistry and Physics; 90th Edition, Internet Version 2010, 9. D.R. Lide (Ed.).
32. Ruscic B., Berkowitz J. J. Chem. Phys. 1991, 95:4378.
33. Schuster F., Maury F., Nowak J.F., Bernard C. Surf. Coat. Technol. 1991, 46:275.
34. Granier B., Coutures J.P. Comptes Rendus Acad. Sci. Paris, série C 1980, 290:275.
35. Granier B., Renard R., Coutures J.P. Rev. Int. Hautes Temp. Refract. 1980, 17:235.
36. Stoney G.G. Proc. R. Soc. London, Ser. A 1909, 82:172.
37. Holmberg K., Matthews A. Coating Tribology. Tribology Series 1994, 28. Elsevier, Amsterdam. D. Dowson (Ed.).