Characterisation of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 164-168

  Agouram, Saïd ^a   Bodart, Franz ^a   Terwagne, Guy ^a  

^a UNIVERSITY OF NAMUR   (Belgium)

Author keywords

Chromium oxynitride; Low energy electron induced X ray spectroscopy; RNRA; Rutherford backscattering spectroscopy; X ray photoemission spectroscopy

Indexed keywords

ATMOSPHERIC HUMIDITY; CHEMICAL BONDS; ELECTRONS; MAGNETRON SPUTTERING; NUCLEAR REACTORS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STOICHIOMETRY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

LOW ENERGY ELECTRONS; METALLIC MODE;

CHROMIUM COMPOUNDS;

COATING;

EID: 16744366449     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.060     Document Type: Article

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