Stress analysis of polycrystalline thin films and surface regions by X-ray diffraction

Journal of Applied Crystallography

Volumn 38, Issue 1, 2005, Pages 1-29

  Welzel, U ^a   Ligot, J ^a   Lamparter, P ^a   Vermeulen, A C ^b   Mittemeijer, E J ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^b MALVERN INSTRUMENTS LTD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTIC METHOD; ANISOTROPY; CALCULATION; CRYSTAL STRUCTURE; FILM; GEOMETRY; MATERIAL COATING; MATHEMATICAL ANALYSIS; MECHANICAL STRESS; REVIEW; ROTATION; SURFACE PROPERTY; X RAY DIFFRACTION;

EID: 13944267499     PISSN: 00218898     EISSN: None     Source Type: Journal    
DOI: 10.1107/S0021889804029516     Document Type: Review

References (96)

1. Acker, K. van, de Buyser, L., Celis, J. P. & van Houtte, P. (1994). J. Appl. Cryst. 27, 56-66.
2. Ballard, B. L., Predecki, P. K., Watkins, T. R., Kozaczek, K. J., Braski, D. N. & Hubbard, C. R. (1997). Adv. X-ray Anal. 39, 363-370.
3. Baron, H. U. & Hauk, V. (1988). Z. Metallkd. 79, 41-49, 127-131.
4. Behnken, H. & Hauk, V. (1991). Z. Metallkd. 82, 151-158.
5. Behnken, H. & Hauk, V. (2000). In Proceedings of ICRS6, 10-12 July 2000, Oxford, pp. 277-282. London: IOM Communications.
6. Bollenrath, F., Hauk, V. & Müller, E. H. (1967). Z. Metallkd. 58, 76-82.
7. Bollenrath, F., Osswald, E., Möller, H. & Neerfeld, H. (1941). Arch. Eisenhüttenwesen, 15, 183-194.
8. Brakman, C. M. (1983). J. Appl. Cryst. 16, 325-340.
9. Brakman, C. M., de Keiijser, Th. H., van der Pers, N. M., Penning, P. & Radelaar, S. (1988). Philos. Mag. A, 58, 635-60.
10. Bunge, H.-J. (1982). Texture Analysis in Materials Science. London: Butterworths.
11. Christenson, A. L. & Rowland, E. S. (1953). Trans. ASM, 45, 638-676.
12. Delhez, R., de Keijser, Th. H. & Mittemeijer, E. J. (1982), Fresen. Z. Anal. Chem. 312, 1-16.
13. Delhez, R., de Keijser, Th. H. & Mittemeijer, E. J. (1987). Surf. Eng. 3, 331-342.
14. Dölle, H. (1979). J. Appl. Cryst. 12, 489-501.
15. Dölle, H. & Hauk, V. (1976). Härt.-Tech. Mitt. 31, 165-168.
16. Dölle, H. & Hauk, V. (1978). Z. Metallkd. 69, 410-417.
17. Dölle, H. & Hauk, V. (1979). Z. Metallkd. 70, 682-685.
18. Dümmer, T., Eigenmann, B., Stüßer, M., Leiste, H., Löhe, D., Müller, H. & Vöhringer, O. (1999). Z. Metallkd. 90, 780-787.
19. Eigenmann, B. & Macherauch, E. (1995). Mater.-Wiss. u. Werkstofftech. 26, 148-160, 199-216.
20. Eigenmann, B. & Macherauch, E. (1996). Mater.-Wiss. u. Werkstofftech. 27, 426-437, 491-501.
21. Eigenmann, B., Scholtes, B. & Macherauch, E. (1992). Residual Stresses III, edited by H. Fujiwara, T. Abe & K. Tanaka, pp. 601-606. Amsterdam: Elsevier Applied Science.
22. Eshelby, J. D. (1957). Proc. R. Soc. A, 241, 376-396.
23. Evenschor, P. D. & Hauk, V. (1975). Z. Metallkd. 66, 167-168.
24. Giacovazzo, C., Monaco, H. L., Voterbo, D., Scordari, F., Gilli, G., Zanotti, G. & Catti, M. (1998). Fundamentals of Crystallography. Oxford: Oxford Science.
25. Genzel, Ch. (1994). Phys. Status Solidi A, 146, 629-637.
26. Genzel, Ch. (1997). Phys. Status Solidi A, 159, 283-296.
27. Genzel, Ch. (1999). J. Appl. Cryst. 32, 770-778.
28. Genzel, Ch., Broda, M., Dantz, D. & Reimers, W. (1999). J. Appl. Cryst. 32, 779-787.
29. Hauk, V. (1952). Arch. Eisenhüttenwesen, 23, 353-361.
30. Hauk, V. (1986). Adv. X-ray Anal. 29, 1-15.
31. Hauk, V. (1995). Härt.-Tech. Mitt. 50, 138-144.
32. Hauk, V. (1997). Editor. Structural and Residual Stress Analysis by Nondestructive Methods. Amsterdam: Elsevier.
33. Hauk, V. & Krüger, B. (2000). Mater. Sci. Eng. A, 284, 261-267.
34. Hauk, V & Nikolin, H.-J. (1989). Z. Metallkd. 80, 862-872.
35. Hauk, V. & Oudelhoven, R. (1988). Z. Metallkd. 79, 41-49.
36. Hauk, V. & Vaessen, G. (1985). Z. Metallkd. 76, 102-107.
37. Hill, R. (1952). Proc. Phys. Soc. London, 65, 349-354.
38. Hoffman, R. W. (1966). The Mechanical Properties of Thin Condensed Films, in Physics of Thin Films, Vol. 3, edited by G. Hass & R. E. Thun, pp. 211-273. New York: Academic Press.
39. Hoffman, R. W. (1976). Mechanical Properties of Non-Metallic Thin Films, in Physics of Non-Metallic Thin Films, edited by C. H. S. Dupuy & A. Cachard, Proceedings NATO Advanced Study Institutes Series, Series B: Physics, Vol. 14, pp. 273-353. New York: Plenum Press.
40. Kamminga, J. D., Delhez, R., de Keijser, Th. H. & Mittemeijer, E. J. (2000a). J. Appl. Cryst. 33, 108-111.
41. Kamminga, J. D., de Keijser, Th. H., Delhez, R. & Mittemeijer, E. J. (2000b). J. Appl. Cryst. 33, 1059-1066.
42. Kneer, G. (1965). Phys. Status Solidi, 9, 825-834.
43. Koch, N., Welzel, U., Wern, H. & Mittemeijer, E. J. (2004). Philos. Mag. 84, 3547-3570.
44. Kröner, E. (1958). Z. Physik, 151, 504-518.
45. Leeuwen, M. van, Kamminga, J.-D. & Mittemeijer, E. J. (1999). J. Appl. Phys. 86, 1904-1914.
46. Leoni, M., Welzel, U., Lamparter, P., Mittemeijer, E. J. & Kamminga, J.-D. (2001). Philos. Mag. A, 81, 597-623.
47. Leoni, M., Welzel, U. & Scardi, P. (2004). J. Res. Natl Inst. Stand. Technol. 109, 27-48.
48. Leverenz, T., Eigenmann, B. & Macherauch, E. (1996). Z. Metallkd. 87, 616-625.
49. Ligot, J., Welzel, U., Lamparter, P. & Mittemeijer, E. J. (2004). In preparation.
50. Lode, W. & Peiter, A. (1981). Metall, 35, 758-762.
51. Ma, C.-H., Huang, J.-H. & Chen, H. (2002). Thin Solid Films, 418, 73-78.
52. Macherauch, E. & Müller, P. (1961). Z. Angew. Phys. 13, 305-312.
53. Macherauch, E., Wohlfahrt, H. & Wolfstieg, U. (1973). Härt.-Tech. Mitt. 28, 201.
54. Machlin, E. S. (1995). Materials Science in Microelectronics, Vol. 2. New York: Giro Press.
55. Marra, W. C., Eisenberger, P. & Cho, A. Y. (1979). J. Appl. Phys. 50, 6927-6933.
56. Meyers, M. A. & Chawla, K. K. (1984). Mechanical Metallurgy, Principles and Applications. Englewood Cliffs, New Jersey: Prentice-Hall.
57. Mittemeijer, E. J. & Scardi, P (2004). Editors. Diffraction Analysis of the Microstructure of Materials. Berlin: Springer.
58. Möller, H. & Barbers, J. (1935). Mitt. K.-Wilh.-Inst. Eisenforschg. 17, 157-177.
59. Möller, H. & Martin, G. (1939). Mitt. K.-Wilh.-Inst. Eisenforschg. 21, 261-269.
60. Neerfeld, H. (1942). Mitt. K.-Wilh.-Inst. Eisenforschg. 24, 61-70.
61. Noyan, I. C. & Cohen, J. B. (1987). Residual Stress. Measurement by Diffraction and Interpretation. New York: Springer.
62. Noyan, I. C., Huang, T. C. & York, B. R. (1995). Crit. Rev. Solid State Mater. Sci. 20, 125-177.
63. Nye, J. F. (1957). Physical Properties of Crystals. Oxford University Press.
64. Ortner, B. (1986a). Adv. X-ray Anal. 29, 113-118.
65. Ortner, B. (1986b). Adv. X-ray Anal. 29, 387-394.
66. Parrat, L. G. (1954). Phys. Rev. 95, 359-369.
67. Predecki, P., Ballard, B. & Zhu, X. (1993). Adv. X-ray Anal. 36, 237-245.
68. Press, W H., Flannery, B. P., Teukolsky, S. A. & Vetterling, W. T. (1986). Numerical Recipes. Cambridge University Press.
69. Quaeyhaegens, C., Knuyt, G. & Stals, L. M. (1995). Surf. Coat. Technol. 74-75, 104-109.
70. Quaeyhaegens, C., Knuyt, G. & Stals, L. M. (1996). J. Vac. Sci. Technol. A, 14, 2462-2468.
71. Reuss, A. (1929). Z. Angew. Math. Mech. 9, 49-58.
72. Roe, R.-J. & Krigbaum, W. R. (1964). J. Chem. Phys. 40, 2608-2615.
73. Serruys, W., Van Houtte, P. & Aernoudt, E. (1987). In Residual Stresses in Science and Technology, edited by E. Macherauch & V Hauk, pp. 417-424. Oberursel: Deutsche Gesellschaft für Metallkunde.
74. Serruys, W., Langouche, F., van Houtte, P. & Aernoudt, E. (1989). In Proceedings of ICRS2, edited by G. Beck, A. Denis & A. Simon, pp. 166-171. London: Elsevier Applied Science.
75. Skrzypek, S. J. & Baczmanski, A. (2001). Adv. X-ray Anal. 44, 134-145.
76. Skrzypek, S. J., Baczmanski, A., Ratuszek, W. & Kusior, E. (2001). J. Appl. Cryst. 34, 427-435.
77. Somers, M. A. J. & Mittemeijer, E. J. (1990). Met. Trans. A, 21, 189-204.
78. Stickforth, J. (1966). Tech. Mitt. Krupp-Forsch.-Ber. 24, 89-102.
79. Tamura, N., MacDowell, A. A., Spolenak, R., Valek, B. C., Bravman, J. C., Brown, W. L., Celestre, R. S., Padmore, H. A., Batterman, B. W. & Patel, J. R. (2003). J. Synchrotron Rad. 10, 137-143.
80. Toney, M. F. & Brennan, S. (1989). Phys. Rev. B, 39, 7963-7966.
81. Vermeulen, A. C. (2000). In Proceedings of ICRS6, pp. 283-290. London: IOM Communications.
82. Vermeulen, A. C. (2002). Mater. Sci. Forum, 404-407, 35-40.
83. Vermeulen, A. C. & Houtman. E. (2000). Mater. Sci. Forum, 347-349, 17-22.
84. Voigt, W. (1910). Lehrbuch der Kristallphysik. Leipzig: Teubner.
85. Vook, R. W. & Witt, F. (1965). J. Appl. Phys. 7, 2169-2171.
86. Wagner, C. N. J., Boldrick, M. S. & Perez-Mendez, V. (1983). Adv. X-ray Anal. 26, 275-282.
87. Welzel, U. & Freour, S. (2004). In preparation.
88. Welzel, U., Freour, S. & Mittemeijer, E. J. (2004). Philos. Mag. Submitted.
89. Welzel, U. Leoni, M. & Mittemeijer, E. J. (2003). Philos. Mag. 83, 603-630.
90. Welzel, U., Leoni, M. & Mittemeijer, E. J. (2004). Diffraction Analysis of the Microstructure of Materials, edited by E. J. Mittemeijer & P. Scardi, pp. 363-390. Berlin: Springer.
91. Welzel, U. & Mittemeijer, E. J. (2003). J. Appl. Phys. 93, 9001-9011.
92. Welzel, U. & Mittemeijer, E. J. (2004). Mater. Sci. Forum, 443-444, 131-134.
93. Willemse, P. F. & Naughton, B. P. (1985). Mater. Sci. Technol. 1, 41-44.
94. Willemse, P. F., Naughton, B. P. & Verbraak, C. A. (1982), Mater. Sci. Eng. 56, 25-37.
95. Windischmann, H. (1992). Crit. Rev. Solid State Mater. Sci. 17, 547-596.
96. Winholtz, R. A. & Cohen, J. B. (1988). Aust. J. Phys. 41, 189-199.