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Surface and Coatings Technology

Volumn 133-134, Issue , 2000, Pages 283-288

Textured titanium oxide thin films produced by vacuum arc deposition

(3) Mandl S a Thorwarth, G a Rauschenbach, B a

a UNIVERSITY OF AUGSBURG (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON; SUBSTRATES; TEXTURES; THIN FILMS; TITANIUM OXIDES; VACUUM APPLICATIONS;

VACUUM ARC DEPOSITION;

VAPOR DEPOSITION;

FILM; TITANIUM; VACUUM DEPOSITION; WEAR PREVENTION;

EID: 0034310621 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(00)00938-5 Document Type: Article

Times cited : (15)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.