Structural characterizations of magnetron sputtered nanocrystalline TiN thin films

Materials Characterization

Volumn 59, Issue 8, 2008, Pages 1015-1020

  Chawla, Vipin ^a   Jayaganthan, R ^a   Chandra, Ramesh ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY ROORKEE   (India)

Author keywords

Characterization; Microstructure; TiN thin films

Indexed keywords

CHARACTERIZATION; DEPOSITION; MAGNETRON SPUTTERING; MICROSTRUCTURAL EVOLUTION; NANOCRYSTALLINE MATERIALS; SURFACE ROUGHNESS; TITANIUM NITRIDE;

DEPOSITION TIME; GRAIN MORPHOLOGY; MICROSTRUCTURAL MORPHOLOGIES; PYRAMIDAL SHAPES;

THIN FILMS;

EID: 44649202788     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchar.2007.08.017     Document Type: Article

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