Electron optics of multi-beam scanning electron microscope

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 645, Issue 1, 2011, Pages 60-67

  Mohammadi Gheidari, A ^a   Kruit, P ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Electron optics; High resolution; High throughput; MBSEM; Multi beam scanning electron microscope

Indexed keywords

ELECTRON OPTICS; LENSES; OPTICAL DESIGN; PROBES; SCANNING; SCANNING ELECTRON MICROSCOPY;

HIGH RESOLUTION; HIGH THROUGHPUT; MBSEM; MULTI-ELECTRON; MULTIBEAMS; OPTICS SIMULATIONS; PROBE CURRENTS; STATE OF THE ART;

ELECTRONS;

EID: 79958224720     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2010.12.146     Document Type: Conference Paper

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