Addition of different contributions to the charged particle probe size

Optik (Jena)

Volumn 101, Issue 3, 1996, Pages 101-109

  Barth, J E ^a   Kruit, P ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ALGORITHMS; CURRENT DENSITY; DIFFRACTION; ELECTRIC CURRENTS; LENSES; PARTICLE OPTICS; PROBES;

CHARGED PARTICLE PROBE SIZE; ROOT POWER SUM ALGORITHM;

CHARGED PARTICLES;

EID: 0029697463     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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