Effects of substrate temperature on the structure and mechanical properties of (TiVCrZrHf)N coatings

Applied Surface Science

Volumn 257, Issue 17, 2011, Pages 7709-7713

  Liang, Shih Chang ^a   Chang, Zue Chin ^b   Tsai, Du Cheng ^a   Lin, Yi Chen ^b   Sung, Huan Shin ^b   Deng, Min Jen ^a,c   Shieu, Fuh Sheng ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NATIONAL CHIN YI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^c JEN TEH JUNIOR COLLEGE OF MEDICINE   (Taiwan)

Author keywords

Coating materials; Crystal structure; Microstructure; Nitride materials; Thin films; Vapor deposition

Indexed keywords

COATINGS; CRYSTAL MICROSTRUCTURE; CRYSTAL STRUCTURE; DEPOSITION; GRAIN SIZE AND SHAPE; HAFNIUM COMPOUNDS; METALLIC FILMS; MICROSTRUCTURE; THIN FILMS; TITANIUM COMPOUNDS; VAPOR DEPOSITION; X RAY DIFFRACTION; ZIRCONIUM COMPOUNDS;

AMORPHOUS STRUCTURES; COATING MATERIAL; DENSE COLUMNAR STRUCTURES; FACE CENTERED CUBIC STRUCTURE; NANO GRAIN STRUCTURE; NITRIDE MATERIALS; RF REACTIVE MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE;

CHROMIUM COMPOUNDS;

EID: 79957450848     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.04.014     Document Type: Article

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