Multi-component nitride coatings derived from Ti-Al-Cr-Si-V target in RF magnetron sputter

Surface and Coatings Technology

Volumn 201, Issue 14, 2007, Pages 6304-6308

  Lin, C H ^a   Duh, J G ^a   Yeh, J W ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Amorphous; FE EPMA; Hard coating; Multi component; Nanoindentation; Nanostructure; RF sputter

Indexed keywords

HARD COATINGS; HARDNESS TESTING; MICROHARDNESS; NANOINDENTATION; NANOSTRUCTURED MATERIALS; NITRIDES; SURFACE MORPHOLOGY; X RAY DIFFRACTION ANALYSIS;

MICROHARDNESS TEST; MULTI-COMPONENT NITRIDE; NITRIDE COATINGS; RF MAGNETRON SPUTTERING;

MAGNETRON SPUTTERING;

HARD COATINGS; HARDNESS TESTING; MAGNETRON SPUTTERING; MICROHARDNESS; NANOINDENTATION; NANOSTRUCTURED MATERIALS; NITRIDES; SURFACE MORPHOLOGY; X RAY DIFFRACTION ANALYSIS;

EID: 33847030674     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.11.041     Document Type: Article

References (24)

1. Yeh J.W., Chen S.K., Lin S.J., and Gan J.Y. Adv. Eng. Mater. 6 5 (2004) 299
2. Huang P.K., Yeh J.W., Shen T.T., and Chen S.K. Adv. Eng. Mater. 6 1-2 (2004) 74
3. Chen T.K., Shun T.T., Yeh J.W., and Wong M.S. Surf. Coat. Technol. 188-189 (2004) 193
4. Chen Y.Y., Duval T., Hung U.D., Yeh J.W., and Shih H.C. Corros. Sci. 47 (2005) 2257
5. Chen H.K., Li S.H., and Duh J.G. J. Electron. Mater. 34 12 (2005) 1480
6. Abrari F., and Elbestawi M.A. Int. J. Mach. Tools Manuf. 37 (1990) 17
7. Barril S., Mischler S., and Landolt D. Tribol. Int. 34 (2001) 599
8. Panjan P., Navinsek B., Cvelbar A., Zalar A., and Vlcek J. Surf. Coat. Technol. 98 (1998) 1497
9. Almer J., Oden M., Hultman L., and Håkansson G. J. Vac. Sci. Technol., A 18 1 (2000) 121
10. Mayrhofer P.H., Tischler G., and Mitterer C. Surf. Coat. Technol. 142-144 (2001) 78
11. Kim C.W., and Kim K.H. Thin Solid Films 307 (1997) 113
12. Joshi A., and Hu H.S. Surf. Coat. Technol. 76-77 (1995) 499
13. Kale A.N., Ravindranath K., Kothari D.C., and Roale P.M. Surf. Coat. Technol. 145 (2001) 60
14. Wuhrer R., and Yeung W.Y. Scripta Mater. 50 (2004) 1461
15. Uchida M., Nihira N., Mitsuo A., and Toyoda K. Surf. Coat. Technol. 177-178 (2004) 627
16. Park I.W., Choi S.R., Lee M.H., and Kim K.H. J. Vac. Sci. Technol., A 21 4 (2003) 895
17. Park J.H., Chung W.S., Cho Y.R., and Kim K.H. Surf. Coat. Technol. 188-189 (2004) 425
18. Musil J., Zeman H., and Kasl J. Thin Solid Films 413 (2002) 121
19. G.H. Jeng, "Hard Nitride Films of High-Entropy Alloy Prepared by RF Magnetron Sputtering", Master Thesis, National Tsing Hua University, Hsinchu, Taiwan (2005).
20. In: Ohring M. (Ed). The Materials Science of Thin Films (2002), Academic Press, London, UK 174
21. Holleck H. In: Kumar A., Chung Y.W., Moore J.J., and Smugeresky J.E. (Eds). Surface Engineering: Science and Technology I, The Minerals, Metals and Materials Society (1999) 207
22. Wu F.B., Tien S.K., and Duh J.G. Surf. Coat. Technol. 200 5-6 (2005) 1514
23. Tien S.K., and Duh J.G. Thin Solid Films 494 (2006) 173
24. Lynch C.T. Handbook of Material Science. General Properties vol. 1 (1974), CRC Press