SCOPUS 정보 검색 플랫폼

Volumn 518, Issue 20, 2010, Pages 5762-5768

Influence of sputtering parameters and nitrogen on the microstructure of chromium nitride thin films deposited on steel substrate by direct-current reactive magnetron sputtering

(4) Shah, Hetal N a Jayaganthan, R a Kaur, Davinder a Chandra, Ramesh a

a INDIAN INSTITUTE OF TECHNOLOGY ROORKEE (India)

Author keywords

Coatings; Hardness; Scanning electron microscopy; Sputtering; Surface morphology; X ray diffraction

Indexed keywords

304 STAINLESS STEEL; CHROMIUM NITRIDE; DIRECT-CURRENT; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; MAXIMUM HARDNESS; MICROHARDNESS TESTS; MICROSTRUCTURAL CHARACTERISTICS; NITROGEN CONTENT; PREFERRED ORIENTATIONS; PROCESS CONDITION; REACTIVE MAGNETRON SPUTTERING; SPUTTERING GAS; SPUTTERING PARAMETERS; STEEL SUBSTRATE; SUBSTRATE TEMPERATURE;

ATOMIC FORCE MICROSCOPY; CHROMIUM; COATINGS; FIELD EMISSION; FIELD EMISSION MICROSCOPES; HARDNESS; NITRIDES; NITROGEN; SCANNING; SCANNING ELECTRON MICROSCOPY; STAINLESS STEEL; SUBSTRATES; SURFACE TOPOGRAPHY; THIN FILMS; TOPOGRAPHY; VAPOR DEPOSITION; X RAY DIFFRACTION;

SURFACE MORPHOLOGY;

EID: 77955426185 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.05.095 Document Type: Conference Paper

Times cited : (51)

References (33)

1
- 63449103438
- Y. Shi, S. Long, L. Fang, F. Pan, and H. Liao Appl. Surf. Sci. 255 2009 6515
- (2009) Appl. Surf. Sci. , vol.255 , pp. 6515
- Shi, Y.¹ Long, S.² Fang, L.³ Pan, F.⁴ Liao, H.⁵

2
- 0033367034
- Y. Gachon, A.B. Vannes, G. Farges, M.C. Sainte Catherine, I. Caron, and G. Inglebert Wear 233-235 1999 263
- (1999) Wear , vol.233-235 , pp. 263
- Gachon, Y.¹ Vannes, A.B.² Farges, G.³ Sainte Catherine, M.C.⁴ Caron, I.⁵ Inglebert, G.⁶

3
- 28944448440
- M. Bielawski, and D. Seo Surf. Coat. Technol. 200 2005 1476
- (2005) Surf. Coat. Technol. , vol.200 , pp. 1476
- Bielawski, M.¹ Seo, D.²

4
- 0031246458
- P. Hones, R. Sanjines, and F. Levy Surf. Coat. Technol. 94/95 1997 398
- (1997) Surf. Coat. Technol. , vol.94-95 , pp. 398
- Hones, P.¹ Sanjines, R.² Levy, F.³

5
- 13444266367
- J. Musil, P. Baroch, J. Vlcek, K.H. Nam, and J.G. Han Thin Solid Films 475 2005 208
- (2005) Thin Solid Films , vol.475 , pp. 208
- Musil, J.¹ Baroch, P.² Vlcek, J.³ Nam, K.H.⁴ Han, J.G.⁵

6
- 0033703601
- I. Safi Surf. Coat. Technol. 127 2000 203
- (2000) Surf. Coat. Technol. , vol.127 , pp. 203
- Safi, I.¹

7
- 0034318672
- J.N. Tu, J.G. Duh, and S.Y. Tsai Surf. Coat. Technol. 133/134 2000 181
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 181
- Tu, J.N.¹ Duh, J.G.² Tsai, S.Y.³

8
- 0037796112
- R. Gahlin, M. Bromark, P. Hedenqvist, S. Hogmark, and G. Hakansson Surf. Coat. Technol. 76/77 1995 174
- (1995) Surf. Coat. Technol. , vol.76-77 , pp. 174
- Gahlin, R.¹ Bromark, M.² Hedenqvist, P.³ Hogmark, S.⁴ Hakansson, G.⁵

9
- 2442505507
- A.P. Ehiasarian, P.Eh. Hovsepian, L. Hultman, and U. Helmersson Thin Solid Films 457 2004 270
- (2004) Thin Solid Films , vol.457 , pp. 270
- Ehiasarian, A.P.¹ Hovsepian, P.Eh.² Hultman, L.³ Helmersson, U.⁴

10
- 0030262616
- Y. Otani, and S. Hofmann Thin Solid Films 287 1996 188
- (1996) Thin Solid Films , vol.287 , pp. 188
- Otani, Y.¹ Hofmann, S.²

11
- 4243269124
- B. Günter, F. Christoph, B. Erhard, and B. Christina Surf. Coat. Technol. 86/87 1996 184
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 184
- Günter, B.¹ Christoph, F.² Erhard, B.³ Christina, B.⁴

12
- 0024611311
- D. Dubiel Prakt. Met. 26 1989 68
- (1989) Prakt. Met. , vol.26 , pp. 68
- Dubiel, D.¹

13
- 0342263125
- J.A. Sue, and T.P. Chang Surf. Coat. Technol. 76/77 1995 61
- (1995) Surf. Coat. Technol. , vol.76-77 , pp. 61
- Sue, J.A.¹ Chang, T.P.²

14
- 33751021669
- H.C. Barshilia, N. Selvakumar, B. Deepthi, and K.S. Rajam Surf. Coat. Technol. 201 2006 2193
- (2006) Surf. Coat. Technol. , vol.201 , pp. 2193
- Barshilia, H.C.¹ Selvakumar, N.² Deepthi, B.³ Rajam, K.S.⁴

15
- 0037454528
- Z. Han, J. Tian, Q. Lai, X. Yu, and G. Li Surf. Coat. Technol. 162 2003 189
- (2003) Surf. Coat. Technol. , vol.162 , pp. 189
- Han, Z.¹ Tian, J.² Lai, Q.³ Yu, X.⁴ Li, G.⁵

16
- 33645807877
- E. Fornies, R. Escobr Galindo, O. Sanchez, and J.M. Albella Surf. Coat. Technol. 200 2006 6047
- (2006) Surf. Coat. Technol. , vol.200 , pp. 6047
- Fornies, E.¹ Escobr Galindo, R.² Sanchez, O.³ Albella, J.M.⁴

17
- 32544442592
- P. van Essen, R. Hoy, J.D. Kamminga, A.P. Ehiasarian, and G.C.A.M. Janssen Surf. Coat. Technol. 200 2006 3496
- (2006) Surf. Coat. Technol. , vol.200 , pp. 3496
- Van Essen, P.¹ Hoy, R.² Kamminga, J.D.³ Ehiasarian, A.P.⁴ Janssen, G.C.A.M.⁵

18
- 10844235631
- J.J. Olaya, S.E. Rodil, S. Muhl, and E. Sanchez Thin Solid Films 474 2005 119
- (2005) Thin Solid Films , vol.474 , pp. 119
- Olaya, J.J.¹ Rodil, S.E.² Muhl, S.³ Sanchez, E.⁴

19
- 0041697980
- F. Levy, P. Hones, P.E. Schmid, R. Sanjines, M. Diserens, and C. Wiemer Surf. Coat. Technol. 120/121 1999 284
- (1999) Surf. Coat. Technol. , vol.120-121 , pp. 284
- Levy, F.¹ Hones, P.² Schmid, P.E.³ Sanjines, R.⁴ Diserens, M.⁵ Wiemer, C.⁶

20
- 0034511982
- F.B. Wu, J.J. Li, and J.G. Duh Thin Solid Films 377/378 2000 354
- (2000) Thin Solid Films , vol.377-378 , pp. 354
- Wu, F.B.¹ Li, J.J.² Duh, J.G.³

21
- 9944223734
- Z.B. Zhao, Z.U. Rek, S.M. Yalisove, and J.C. Bilello Thin Solid Films 472 2005 96
- (2005) Thin Solid Films , vol.472 , pp. 96
- Zhao, Z.B.¹ Rek, Z.U.² Yalisove, S.M.³ Bilello, J.C.⁴

22
- 0034529436
- K.H. Nam, M.J. Jung, and J.G. Ham Surf. Coat. Technol. 131 2000 222
- (2000) Surf. Coat. Technol. , vol.131 , pp. 222
- Nam, K.H.¹ Jung, M.J.² Ham, J.G.³

23
- 0032639993
- L. Cunha, and M. Andritschky Surf. Coat. Technol. 111 1999 158
- (1999) Surf. Coat. Technol. , vol.111 , pp. 158
- Cunha, L.¹ Andritschky, M.²

24
- 0033361223
- L. Cunha, M. Andritschky, K. Pischow, and Z. Wang Thin Solid Films 355/356 1999 465
- (1999) Thin Solid Films , vol.355-356 , pp. 465
- Cunha, L.¹ Andritschky, M.² Pischow, K.³ Wang, Z.⁴

25
- 33748546935
- H.C. Barshilia, and K.S. Rajam Surf. Coat. Technol. 201 2006 1827
- (2006) Surf. Coat. Technol. , vol.201 , pp. 1827
- Barshilia, H.C.¹ Rajam, K.S.²

26
- 0003602826
- Academic Press California
- M. Ohring Material Science of Thin Films: Deposition and Structure 2002 Academic Press California
- (2002) Material Science of Thin Films: Deposition and Structure
- Ohring, M.¹

27
- 34247146371
- G.A. Zhang, P.X. Yan, P. Wang, Y.M. Chen, and Y.J. Zhang Mater. Sci. Eng., A 460/461 2007 301
- (2007) Mater. Sci. Eng., A , vol.460-461 , pp. 301
- Zhang, G.A.¹ Yan, P.X.² Wang, P.³ Chen, Y.M.⁴ Zhang, Y.J.⁵

28
- 0003427458
- Addison Wesley California
- B.D. Cullity Elements of X-Ray Diffraction 2001 Addison Wesley California
- (2001) Elements of X-Ray Diffraction
- Cullity, B.D.¹

29
- 0032155957
- C. Meunier, S. Vives, and G. Bertrand Surf. Coat. Technol. 107 1998 149
- (1998) Surf. Coat. Technol. , vol.107 , pp. 149
- Meunier, C.¹ Vives, S.² Bertrand, G.³

30
- 33745624010
- R. Chandra, A. Chawla, and P. Ayyub J. Nanosci. Nanotech. 6 2006 1119
- (2006) J. Nanosci. Nanotech. , vol.6 , pp. 1119
- Chandra, R.¹ Chawla, A.² Ayyub, P.³

31
- 0031071145
- H. Sumi, H. Inoue, M. Taguchi, Y. Sugano, H. Masuya, N. Ito, S. Kishida, and H. Tokutaka Jpn. J. Appl. Phys. 36 1997 595
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 595
- Sumi, H.¹ Inoue, H.² Taguchi, M.³ Sugano, Y.⁴ Masuya, H.⁵ Ito, N.⁶ Kishida, S.⁷ Tokutaka, H.⁸

32
- 27944508188
- R. Chandra, A. Chawla, D. Kaur, and P. Ayyub Nanotechnology 16 2005 3053
- (2005) Nanotechnology , vol.16 , pp. 3053
- Chandra, R.¹ Chawla, A.² Kaur, D.³ Ayyub, P.⁴

33
- 0003680984
- L.I. Maissel, and R. Glang Handbook of Thin Film Technology, New York 1970
- (1970) Handbook of Thin Film Technology, New York
- Maissel, L.I.¹ Glang, R.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.