Influence of substrate temperature on structure and mechanical, properties of multi-element (AlCrTaTiZr)N coatings

Surface and Coatings Technology

Volumn 201, Issue 16-17, 2007, Pages 6993-6998

  Lai, Chia Han ^a   Tsai, Ming Hung ^a   Lin, Su Jien ^a   Yeh, Jien Wei ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

B Hardness; B Structure; C Reactive sputtering; D Nitrides; X Multi element

Indexed keywords

CRYSTAL MICROSTRUCTURE; ELASTIC MODULI; HARDNESS; MAGNETRON SPUTTERING; NITRIDES; STRUCTURE (COMPOSITION); SUBSTRATES; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

CHEMICAL COMPOSITION; REACTIVE RF MAGNETRON SPUTTERING;

INORGANIC COATINGS;

CRYSTAL MICROSTRUCTURE; ELASTIC MODULI; HARDNESS; INORGANIC COATINGS; MAGNETRON SPUTTERING; NITRIDES; STRUCTURE (COMPOSITION); SUBSTRATES; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

EID: 34047274802     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.01.001     Document Type: Article

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