Growth dynamics of nanocrystalline diamond thin films deposited by hot filament chemical vapor deposition: Influence of low sticking and renucleation processes

Journal of Physical Chemistry C

Volumn 115, Issue 19, 2011, Pages 9681-9691

  Buijnsters, Josephus G ^a,b   Vázquez, Luis ^c  

^a RADBOUD UNIVERSITY NIJMEGEN   (Netherlands)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

FILM ROUGHNESS; GROWTH DYNAMICS; GROWTH MECHANISMS; GROWTH SPECIES; HOT-FILAMENT CHEMICAL VAPOR DEPOSITION; LATERAL LENGTH; LENGTH SCALE; MICROMETER SCALE; NANOCRYSTALLINE DIAMOND THIN FILMS; NANOCRYSTALLINE DIAMONDS; RENUCLEATION; SECOND GROWTH; SILICON SUBSTRATES; STICKING PROBABILITY; SUBMICROMETERS; TWO-REGIME;

ASSOCIATED GAS; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; DEPOSITION; GAS MIXTURES; GASES; MIXTURES; SEMICONDUCTING SILICON COMPOUNDS; THIN FILMS;

FILM GROWTH;

EID: 79956109388     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp201919r     Document Type: Article

References (66)

1. May, P. W. Science 2008, 319, 1490-1491
2. Balmer, R. S.; Friel, I.; Woollard, S. M.; Wort, C. J. H.; Scarsbrook, G. A.; Coe, S. E.; El-Hajj, H.; Kaiser, A.; Denisenko, A.; Kohn, E.; Isberg, J. Philos. Trans. R. Soc. A 2008, 366, 251-265
3. Auciello, O.; Sumant, A. V. Diamond Relat. Mater. 2010, 19, 699-718
4. Rubio-Retama, J.; Hernando, J.; López-Ruiz, B.; Härtl, A.; Steinmüller, D.; Stutzmann, M.; López-Cabarcos, E.; Garrido, J. A. Langmuir 2006, 22, 5837-5842
5. Stavis, C.; Clare, T. L.; Butler, J. E.; Radadia, A. D.; Carr, R.; Zeng, H.; King, W. P.; Carlisle, J. A.; Aksimentiev, A.; Bashir, R.; Hamers, R. J. Proc. Natl. Acad. Sci. U.S.A. 2011, 108, 983-988
6. Angus, J. C.; Hayman, C. C. Science 1988, 241, 913-921
7. Butler, J. E.; Windischmann, H. MRS Bull. 1998, 23, 22-27
8. May, P. W. Philos. Trans. R. Soc. A 2000, 358, 473-495
9. Balmer, R. S.; Brandon, J. R.; Clewes, S. L.; Dhillon, H. K.; Dodson, J. M.; Friel, I.; Inglis, P. N.; Madgwick, T. D.; Markham, M. L.; Mollart, T. P.; Perkins, N.; Scarsbrook, G. A.; Twitchen, D. J.; Whitehead, A. J.; Wilman, J. J.; Woollard, S. M. J. Phys.: Condens. Matter 2009, 21, 364221
10. Butler, J. E.; Sumant, A. V. Chem. Vap. Deposition 2008, 14, 145-160
11. Gruen, D. M. Annu. Rev. Mater. Sci. 1999, 29, 211-259
12. Gerbi, J. E.; Birrell, J.; Sardela, M.; Carlisle, J. A. Thin Solid Films 2005, 473, 41-48
13. Wiora, M.; Brühne, K.; Flöter, A.; Gluche, P.; Willey, T. M.; Kucheyev, S. O.; van Buuren, A. W.; Hamza, A. V.; Biener, J.; Fecht, H.- J. Diamond Relat. Mater. 2009, 18, 927-930
14. Williams, O. A.; Nesladek, M.; Daenen, M.; Michaelson, S.; Hoffman, A.; Osawa, E.; Haenen, K.; Jackman, R. B. Diamond Relat. Mater. 2008, 17, 1080-1088
15. Sumant, A. V.; Grierson, D. S.; Gerbi, J. E.; Birrell, J.; Lanke, U. D.; Auciello, O.; Carlisle, J. A.; Carpick, R. W. Adv. Mater. 2005, 17, 1039-1045
16. Chromik, R. R.; Winfrey, A. L.; Lning, J.; Nemanich, R. J.; Wahl, K. J. Wear 2008, 265, 477-489
17. Erdemir, A.; Fenske, G. R.; Krauss, A. R.; Gruen, D. M.; McCauley, T.; Csencsits, R. T. Surf. Coat. Technol. 1999, 120-121, 565-572
18. Sumant, A. V.; Krauss, A. R.; Gruen, D. M.; Auciello, O.; Erdemir, A.; Williams, M.; Artiles, A. F.; Adams, W. Tribol. Trans. 2005, 48, 24-31
19. Michaelson, S.; Ternyak, O.; Akhvlediani, R.; Hoffman, A.; Lafosse, A.; Azria, R.; Williams, O. A.; Gruen, D. M. J. Appl. Phys. 2007, 102, 113516
20. Nicoli, M.; Castro, M.; Cuerno, R. Phys. Rev. E 2008, 78, 021601
21. May, P. W.; Harvey, J. N.; Allan, N. L.; Richley, J. C.; Mankelevich, Y. A. J. Appl. Phys. 2010, 108, 014905
22. May, P. W.; Mankelevich, Y. A. Diamond Electronics and BioelectronicsFundamentals to Applications IV; Bergonzo, P.; Butler, J. E.; Nebel, C. E.; Nesladek, M.; Wee, A. T. S., Eds.; MRS Symposium Proceedings; Materials Research Society: Warrendale, PA, 2011; Vol. 1282.
23. May, P. W.; Mankelevich, Y. A. J. Phys. Chem. C 2008, 112, 12432-12441
24. May, P. W.; Allan, N. L.; Ashfold, M. N. R.; Richley, J. C.; Mankelevich, Y. A. J. Phys.: Condens. Matter 2009, 21, 364203
25. May, P. W.; Allan, N. L.; Ashfold, M. N. R.; Richley, J. C.; Mankelevich, Y. A. Diamond Relat. Mater. 2010, 19, 389-396
26. Kulisch, W.; Popov, C. Phys. Status Solidi A 2006, 203, 203-219
27. Barabási, A. L.; Stanley, H. E. Fractal Concepts in Surface Growth; Cambridge University Press: Cambridge, 1995.
28. Cuerno, R.; Vázquez, L. Advances in Condensed Matter and Statistical Physics; Nova Science: New York, 2004.
29. Ojeda, F.; Cuerno, R.; Salvarezza, R.; Vázquez, L. Phys. Rev. Lett. 2000, 84, 3125-3128
30. Zhao, Y.- P.; Drotar, J. T.; Wang, G.- C.; Lu, T.- M. Phys. Rev. Lett. 2001, 87, 136102
31. Buijnsters, J. G.; Vázquez, L. J. Phys. D: Appl. Phys. 2008, 41, 012006
32. Hormann, C.; Meier, S.; Moseler, M. Eur. Phys. J. B 2009, 69, 187-194
33. Buijnsters, J. G.; Vázquez, L. J. Appl. Phys. 2009, 106, 033504
34. Salvadori, M. C.; Silveira, M. G.; Cattani, M. Phys. Rev. E 1998, 58, 6814-6816
35. Cattani, M.; Salvadori, M. C. Thin Solid Films 2000, 376, 264-266
36. Cuerno, R.; Castro, M.; Muñoz-Garcia, J.; Gago, R.; Vázquez, L. Eur. Phys. J. Spec. Top. 2007, 146, 427-441
37. Buijnsters, J. G.; Vázquez, L.; ter Meulen, J. J. Diamond Relat. Mater. 2009, 18, 1239-1246
38. Buijnsters, J. G.; Vázquez, L.; van Dreumel, G. W. G.; ter Meulen, J. J.; van Enckevort, W. J. P.; Celis, J. P. J. Appl. Phys. 2010, 108, 103514
39. Buijnsters, J. G.; Vázquez, L.; Escobar Galindo, R.; ter Meulen, J. J. J. Nanosci. Nanotechnol. 2010, 10, 2885-2891
40. Van der Drift, A. Philips Res. Rep. 1967, 22, 267-288
41. Kardar, M.; Parisi, G.; Zhang, Y.-C. Phys. Rev. Lett. 1986, 56, 889-892
42. Edwards, S. F.; Wilkinson, D. R. Proc. R. Soc. London 1982, 381, 17-31
43. Krug, J. Adv. Phys. 1997, 46, 139-282
44. Buijnsters, J. G.; Camero, M.; Vázquez, L. Phys. Rev. B 2006, 74, 155417
45. Ferrari, A. C.; Robertson, J. Philos. Trans. R. Soc. London A 2004, 362, 2477-2512
46. Buijnsters, J. G.; Shankar, P.; ter Meulen, J. J. Surf. Coat. Technol. 2007, 201, 8955-8960
47. Klauser, F.; Steinmüller-Nethl, D.; Kaindl, R.; Bertel, E.; Memmel, N. Chem. Vap. Deposition 2010, 16, 127-135
48. Liu, X.; Klauser, F.; Memmel, N.; Bertel, E.; Pichler, T.; Knupfer, M.; Kromka, A.; Steinmüller-Nethl, D. Diamond Relat. Mater. 2007, 16, 1463-1470
49. Krim, J.; Indekeu, J. O. Phys. Rev. E 1993, 48, 1576-1578
50. Mandelbrot, B. B.; van Ness, J. W. SIAM Rev. 1968, 10, 422-437
51. Lauritsen, K. B.; Sahimi, M.; Herrmann, H. J. Phys. Rev. E 1993, 48, 1272-1278
52. Kondoh, E.; Ohta, T.; Mitomo, T.; Tohtsuka, K. J. Appl. Phys. 1992, 72, 705-711
53. Ohsawa, Y.; Tamou, Y.; Kikuchi, N.; Hiraga, K.; Oku, T. J. Mater. Sci. 1991, 26, 3748-3752
54. Qin, L. C.; Zhou, D.; Krauss, A. R.; Gruen, D. M. Nanostruct. Mater. 1998, 10, 649-660
55. Ruan, S.; Schuh, C. A. J. Appl. Phys. 2010, 107, 073512
56. Mullins, W. W. J. Appl. Phys. 1957, 28, 333-339
57. Mullins, W. W. J. Appl. Phys. 1959, 30, 77-83
58. De Barros, M. I.; Serin, V.; Vandenbulcke, L.; Botton, G.; Andreazza, P.; Phaneuf, M. W. Diamond Relat. Mater. 2002, 11, 1544-1551
59. Wild, C.; Kohl, R.; Herres, N.; Müller-Sebert, W.; Koidl, P. Diamond Relat. Mater. 1994, 3, 373-381
60. Harris, S. J. Appl. Phys. Lett. 1990, 56, 2298-2300
61. Butler, J. E.; Woodin, R. L. Philos. Trans. R. Soc. London A 1993, 342, 209-224
62. Butler, J. E.; Oleynik, I. Philos. Trans. R. Soc. London A 2008, 366, 295-311
63. May, P. W.; Ashfold, M. N. R.; Mankelevich, Yu. A. J. Appl. Phys. 2007, 101, 053115
64. Eckert, M.; Neyts, E.; Bogaerts, A. Cryst. Growth Des. 2010, 10, 3005-3021
65. Sun, J.; Zhang, Y.; He, D. Diamond Relat. Mater. 2000, 9, 1668-1672
66. Sternschulte, H.; Rabl, H. E.; Steinmüller-Nethl, D.; Tilg, B. Chem. Vap. Deposition 2008, 14, 232-235