Chemical adsorption growth model for hot filament chemical vapor deposition diamond

Diamond and Related Materials

Volumn 9, Issue 9, 2000, Pages 1668-1672

  Sun, Jianwei ^a   Zhang, Yafei ^a   He, Deyan ^a  

^a LANZHOU UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; DESORPTION; DETERIORATION; FILM GROWTH; MATHEMATICAL MODELS; NUMERICAL METHODS; SURFACES; THERMAL EFFECTS;

ARRHENIUS LAW; ATOMIC HYDROGEN; CHEMICAL ADSORPTION GROWTH MODEL; HOT FILAMENT CHEMICAL VAPOR DEPOSITION;

DIAMOND FILMS;

EID: 0034273467     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00315-0     Document Type: Article

References (23)

1. D.G Goodwin G.G Gavillet J. Appl. Phys. 68 1990 6393
2. K.L Menningen C.J Erichson M.A Childs L.W Anderson J.E Lawler J. Mater. Res. 10 1995 1108
3. M.C McMaster W.L Hsu M.E Coltrin D.S Dandy J. Appl. Phys. 76 1996 7567
4. F.G Celii P.E Pehrsson H.-t Wang J.E Butler Appl. Phys. Lett. 52 1988 2043
5. S.J Harris A.M Weiner J. Appl. Phys. 67 1990 6520
6. W.L Hsu Appl. Phys. Lett. 59 1991 1427
7. F.G Celli J.E Bulter Annu. Rev. Phys. Chem. 42 1991 643
8. M.E Coltrin D.S Dandy J. Appl. Phys. 74 1993 5803
9. S.S Lee D.W Minsek D.J Vestyck P Chen Science 263 1994 1596
10. J Wu F.C Hong Appl. Phys. Lett. 70 1997 185
11. B.B Pate Surf. Sci. 165 1986 83
12. J.C Angus H.A Will W.S Stanko J. Appl. Phys. 39 1968 2915
13. N Setaka G.W Cullen J Blocher Proceedings of the 10th International Conference on Chemical Vapor Deposition 1987 Electrochemical Society Pennington, NJ 1156
14. L.J Ford J. Appl. Phys. 78 1995 511
15. M.R Shen H Wang Z.Y Ning C Ye Z.X Ren J. Phys.: Condens. Matter 8 1996 8953
16. F Behrendt O Deutschmann B Ruf J Warnatz J. Vac. Sci. Technol. A 14 1996 1604
17. W Moller Appl. Phys. A 56 1993 527
18. J.H de Boer The Dynamical Character of Adsorption 2nd 1968 Clarendon Press Oxford
19. D.O Hayward B.M.W Trapnell Chemisorption 2nd 1964 Butterworths London
20. H.O Pierson Handbook of Carbon, Graphite, Diamond and Fullerenes 1993 Noyes Publications New Jersey
21. K.H Chen M.C Chuang C.M Penney W.F Banholzer J. Appl. Phys. 71 1992 1485
22. Y.F Zhang Z.Z Zhou J.W Sun G.H Chen Phys. Lett. A 214 1996 76
23. E Kondoh T Ohta T Mitomo K Ohtsuka J. Appl. Phys. 73 1993 3041