Surface morphology stabilization by chemical sputtering in carbon nitride film growth

Journal of Physics D: Applied Physics

Volumn 41, Issue 1, 2008, Pages

  Buijnsters, J G ^a   Vazquez L ^b  

^a RADBOUD UNIVERSITY NIJMEGEN   (Netherlands)

^b INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NITRIDE; CHEMICAL STABILITY; CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; ETCHING; SPUTTERING; SURFACE MORPHOLOGY;

CHEMICAL SPUTTERING; CYCLOTRON RESONANCE CHEMICAL VAPOUR DEPOSITION; FILM SURFACE STABILIZATION; NITROGEN ETCHING;

FILM GROWTH;

EID: 38549162298     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/1/012006     Document Type: Article

References (16)

1. Sjöström H, Stafström S, Boman M and Sundgren J E 1995 Phys. Rev. Lett. 75 1336-9
2. Scharf T W, Ott R D, Yang D and Barnard J A 1999 J. Appl. Phys. 85 3142-54
3. Hammer P and Alvarez F 2001 Thin Solid Films 398-399 116-23
4. Godet C, Conway N M J, Bourée J E, Bouamra K, Grosman A and Ortega C 2002 J. Appl. Phys. 91 4154-62
5. Jacob W, Hopf C and Schlüter M 2005 Appl. Phys. Lett. 86 204103
6. Hammer P and Gissler W 1996 Diamond Relat. Mater. 5 1152-8
7. Hong J and Turban G 1999 Diamond Relat. Mater. 8 572-6
8. Hopf C, Schülter M and Jacob W 2007 Appl. Phys. Lett. 90 224106
9. Camero M, Buijnsters J G, Gómez-Aleixandre C, Gago R, Caretti I and Jiménez I 2007 J. Appl. Phys. 101 63515
10. Cale T S and Mahadev V 1996 Modelling of Film Deposition for Microelectronic Applications, Thin Films vol 22 ed S Rossnagel and A Ulman (San Diego, CA: Academic)
11. Le Bellac D, Niklasson G A and Granqvist C G 1995 Europhys. Lett. 32 155-9
12. Dalakos G T, Plawsky J L and Persans P D 2004 Appl. Phys. Lett. 85 3462-4
13. Barabsi A L and Stanley H E 1995 Fractal Concepts in Surface Growth (Cambridge: Cambridge University Press)
14. Jung Y, Kim I and Kim J M 1998 Phys. Rev. E 58 5467-70
15. Singh V K, Shaqfeh E S G and McVittie J P 1994 J. Vac. Sci. Technol. B 12 2952-62
16. Borgström M T, Immink G, Ketelaars B, Algra R and Bakkers E P A M 2007 Nature Nanotechnol. 2 541-4