Enhancement of the nucleation of smooth and dense nanocrystalline diamond films by using molybdenum seed layers

Journal of Applied Physics

Volumn 108, Issue 10, 2010, Pages

  Buijnsters, J G ^a,b   Vazquez L ^c   Van Dreumel, G W G ^b   Ter Meulen, J J ^b   Van Enckevort, W J P ^b   Celis, J P ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b RADBOUD UNIVERSITY NIJMEGEN   (Netherlands)

^c INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND NUCLEATION; DIAMOND POWDERS; GRAZING INCIDENCE; HOT-FILAMENT CHEMICAL VAPOR DEPOSITION; LOW TEMPERATURES; MICRO RAMAN SPECTROSCOPY; NANO-SIZED; NANOCRYSTALLINE DIAMOND FILMS; NANOSIZED DIAMONDS; NCD FILMS; NUCLEATION KINETICS; NUCLEATION OF DIAMONDS; NUCLEATION PROCESS; SEED LAYER; SI SUBSTRATES; SILICON SUBSTRATES; SUBMICRON;

ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CARBONIZATION; CHEMICAL VAPOR DEPOSITION; DIAMONDS; METHANE; MOLYBDENUM; NANOCRYSTALLINE SILICON; NUCLEATION; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACE ROUGHNESS; ULTRASONICS;

DIAMOND FILMS;

EID: 78650256495     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3506525     Document Type: Conference Paper

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