Microcrystalline, nanocrystalline, and ultrananocrystalline diamond chemical vapor deposition: Experiment and modeling of the factors controlling growth rate, nucleation, and crystal size

Journal of Applied Physics

Volumn 101, Issue 5, 2007, Pages

  May, P W ^a   Ashfold, M N R ^a   Mankelevich, Yu A ^b  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; GROWTH RATE; HYDROGEN; METHANE; MICROCRYSTALS; NANOCRYSTALLINE MATERIALS; NUCLEATION; PHASE COMPOSITION;

MICROCRYSTALLINE DIAMONDS; NANOCRYSTALLINE DIAMONDS;

GAS MIXTURES;

EID: 33947322679     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2696363     Document Type: Article

References (31)

1. P. W. May, Philos. Trans. R. Soc. London, Ser. A 0962-8428 10.1098/rsta.2000.0542 358, 473 (2000).
2. S. J. Harris, Appl. Phys. Lett. 0003-6951 10.1063/1.102946 56, 2298 (1990).
3. D. G. Goodwin and J. E. Butler, in Handbook of Industrial Diamonds and Diamond Films, edited by, M. A. Prelas, G. Popovici, and, L. K. Bigelow, (Marcel Dekker, New York, 1998).
4. Synthesis, Properties and Applications of Ultrananocrystalline Diamond, NATO Science Series Part II, Vol. 192, edited by, D. M. Gruen, O. A. Shenderova, amd, A. Y. Vul', (Springer, New York, 2005).
5. X. Xiao, J. Birrell, J. E. Gerbi, O. Auciello, and J. A. Carlisle, J. Appl. Phys. 0021-8979 10.1063/1.1769609 96, 2232 (2004).
6. O. A. Williams, M. Daenen, J. D'Haen, K. Haenen, J. Maes, V. V. Moshchalkov, M. Nesládek, and D. M. Gruen, Diamond Relat. Mater. 0925-9635 10.1016/j.diamond.2005.12.009 15, 654 (2006).
7. P. W. May, J. A. Smith, and Y. A. Mankelevich, Diamond Relat. Mater. 0925-9635 10.1016/j.diamond.2005.06.044 15, 345 (2006).
8. D. Zhou, T. G. McCauley, L. C. Qin, A. R. Krauss, and D. M. Gruen, J. Appl. Phys. 0021-8979 10.1063/1.366668 83, 540 (1998).
9. P. W. May, J. N. Harvey, J. A. Smith, and Y. A. Mankelevich, J. Appl. Phys. 0021-8979 10.1063/1.2195347 99, 104907 (2006).
10. P. W. May and Y. A. Mankelevich, J. Appl. Phys. 0021-8979 10.1063/1.2214304 100, 024301 (2006).
11. J. R. Rabeau, P. John, J. I. B. Wilson, and Y. Fan, J. Appl. Phys. 0021-8979 10.1063/1.1810637 96, 6724 (2004).
12. Y. F. Zhang, D. Dunn-Rankin, and P. Taborek, J. Appl. Phys. 0021-8979 10.1063/1.355043 74, 6941 (1993).
13. H. Yamada, A. Chayahara, Y. Mokuno, Y. Horino, and Y. Fujimori, Diamond Relat. Mater. 15, 522 (2006).
14. B. W. Yu and S. L. Girshick, J. Appl. Phys. 0021-8979 10.1063/1.356037 75, 3914 (1994).
15. Y. A. Mankelevich, A. T. Rakhimov, and N. V. Suetin, Diamond Relat. Mater. 0925-9635 10.1016/S0925-9635(98)00163-0 7, 1133 (1998).
16. S. Skokov, B. Weiner, and M. Frenklach, J. Phys. Chem. 0022-3654 10.1021/j100079a030 98, 7073 (1994).
17. G. P. Smith, http://www.me.berkeley.edu/gri-mech.
18. Y. A. Mankelevich, N. V. Suetin, M. N. R. Ashfold, J. A. Smith, and E. Cameron, Diamond Relat. Mater. 0925-9635 10.1016/S0925-9635(00)00419-2 10, 364 (2001).
19. M. N. R. Ashfold, P. W. May, J. R. Petherbridge, K. N. Rosser, J. A. Smith, Y. A. Mankelevich, and N. V. Suetin, Phys. Chem. Chem. Phys. 1463-9076 10.1039/b104265n 3, 3471 (2001).
20. J. A. Smith, J. B. Wills, H. S. Moores, A. J. Orr-Ewing, Yu. A. Mankelevich, and N. V. Suetin, J. Appl. Phys. 0021-8979 10.1063/1.1481961 92, 672 (2002).
21. A. C. Ferrari and J. Robertson, Phys. Rev. B 0163-1829 10.1103/PhysRevB.63.121405 63, 121405 (2001).
22. G. Leyendecker, J. Doppelbauer, D. Bäuerle, P. Geittner, and H. Lydtin, Appl. Phys. A: Solids Surf. 30, 237 (1983).
23. D. S. Dandy and M. E. Coltrin, J. Mater. Res. 10, 1993 (1995).
24. Physical Data, edited by, I. S. Grigoriev, and, E. Z. Meilihov, (Energoatomizdat, Moscow, 1991), p. 365.
25. J. B. Wills, M. N. R. Ashfold, A. J. Orr-Ewing, Y. A. Mankelevich, and N. V. Suetin, Diamond Relat. Mater. 12, 1346 (2003).
26. Y. A. Mankelevich, N. V. Suetin, M. N. R. Ashfold, W. E. Boxford, A. J. Orr-Ewing, J. A. Smith, and J. B. Wills, Diamond Relat. Mater. 0925-9635 10.1016/S0925-9635(02)00272-8 12, 383 (2003).
27. S. Skokov, B. Weiner, and M. Frenklach, J. Phys. Chem. 0022-3654 10.1021/j100052a003 98, 8 (1994).
28. Y. K. Liu, Y. Tzeng, C. Liu, P. Tso, and I. N. Lin, Diamond Relat. Mater. 0925-9635 10.1016/j.diamond.2004.05.006 13, 1859 (2004).
29. S. Schwarz, S. M. Rosiwal, M. Frank, D. Breidt, and R. F. Singer, Diamond Relat. Mater. 0925-9635 10.1016/S0925-9635(01)00702-6 11, 589 (2002).
30. L. N. Krasnoperov, I. J. Kalinovski, H. N. Chu, and D. Gutman, J. Phys. Chem. 0022-3654 10.1021/j100147a036 97, 11787 (1993).
31. M. Frenklach (private communication).