Multilayer-array growth of SiGeC alloys on Si(001)

Applied Physics Letters

Volumn 80, Issue 1, 2002, Pages 43-45

  LeThanh, Vinh ^a   Calmes, C ^a   Zheng, Y ^a   Bouchier, D ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CARBON FILMS; CHEMICAL VAPOR DEPOSITION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MULTILAYER FILMS; MULTILAYERS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; STACKING FAULTS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

CARBON CONTENT; DEFECT-FREE; HIGH RESOLUTION X RAY DIFFRACTION; MICROTWINS; MULTILAYER ARRAYS; SIGEC ALLOY; SITU REFLECTION; ULTRAHIGH VACUUM CHEMICAL VAPOR DEPOSITION SYSTEMS;

SILICON ALLOYS;

EID: 79956036591     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1428631     Document Type: Article

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