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Volumn 68, Issue 6, 1996, Pages 782-784

The onset of secondary phase precipitation during synthesis of heteroepitaxial Si1-x-yGexCy on Si(100)

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0008049260     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116531     Document Type: Article
Times cited : (14)

References (22)
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    • R. W. Olesinki and G. J. Abbaschian, Bull. Alloy Phase Diagrams 5, 484 (1984)
    • R. W. Olesinki and G. J. Abbaschian, Bull. Alloy Phase Diagrams 5, 484 (1984).
  • 9
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    • R. C. Newman and J. Wakefield, Metallurgy of Semiconductor Materials, edited by J. B. Schroeder (Interscience, New York, 1962), Vol. 15, p. 201
    • R. C. Newman and J. Wakefield, Metallurgy of Semiconductor Materials, edited by J. B. Schroeder (Interscience, New York, 1962), Vol. 15, p. 201.
  • 12
    • 22244492395 scopus 로고    scopus 로고
    • N. Herbots and O. C. Hellman, US Patent #4,800,100 (1989)
    • N. Herbots and O. C. Hellman, US Patent #4,800,100 (1989).
  • 14
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    • P. Ye, Ph.D. Thesis, Arizona State University (1995)
    • P. Ye, Ph.D. Thesis, Arizona State University (1995).
  • 16
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    • S. Hearne, N. Herbots, J. Xiang, P. Ye, and H. Jacobsson, Nucl. Instrum. Methods B (to be published)
    • S. Hearne, N. Herbots, J. Xiang, P. Ye, and H. Jacobsson, Nucl. Instrum. Methods B (to be published).
  • 19
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    • S. Sego, R. J. Culbertson, D. J. Smith, Z. Atzmon, and A. E. Bair, J. Vac. Sci. Technol. A (to be published)
    • S. Sego, R. J. Culbertson, D. J. Smith, Z. Atzmon, and A. E. Bair, J. Vac. Sci. Technol. A (to be published).
  • 22
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    • H. Jacobsson, P. Ye, N. Herbots, S. Hearne, and J. Xiang, Nucl. Instrum. Methods. B (to be published)
    • H. Jacobsson, P. Ye, N. Herbots, S. Hearne, and J. Xiang, Nucl. Instrum. Methods. B (to be published).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.