Crystalline-to-amorphous transition in chemical vapor deposition of pseudomorphic Si1-x-yGexCy films

Applied Physics Letters

Volumn 71, Issue 12, 1997, Pages 1634-1636

  Laursen, T ^a,b   Chandrasekhar, D ^a   Smith, David J ^a   Mayer, J W ^a   Huffman, J ^b   Westhoff, R ^b   Robinson, McD ^b  

^a ARIZONA STATE UNIVERSITY   (United States)

^b Lawrence Semiconduct Res Lab   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001672112     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120001     Document Type: Article

References (7)

1. Z. Atzmon, A. E. Bair, E. J. Jaquez, J. W. Mayer, D. Chandrasekhar, D. J. Smith, R. L. Hervig, and McD. Robinson, Appl. Phys. Lett. 65, 2559 (1994).
2. D. C. Ahlgren, D. A. Sutherland, M. M. Gilbert, D. R. Greenberg, S.-J. Jeng, J. C. Malinovski, D. Nguyen-Ngoc, K. J. Stein, D. L. Harame, and B. Meyerson, ESSDERC'96, Technical Digest (Editions Frontieres, Gif-Sur-Yvette Cedex, France, 1996) p. 453.
3. E. T. Croke, A. T. Hunter, C. C. Ahn, T. Laursen, D. Chandrasekhar, A. E. Bair, D. J. Smith, and J. W. Mayer, J. Cryst. Growth (to be published).
4. J. W. Strane, H. J. Stein, S. R. Lee, B. L. Doyle, S. T. Picraux, and J. W. Mayer, Appl. Phys. Lett. 63, 2786 (1993).
5. S. Hearne, N. Herbots, J. Xiang, P. Ye, and H. Jacobsson, Nucl. Instrum. Methods Phys. Res. B 118, 88 (1996).
6. A. E. Bair, Z. Atzmon, S. W. Russell, T. L. Alford, J. W. Mayer, and J. C. Barbour, Nucl. Instrum. Methods Phys. Res. B 103, 339 (1996).
7. J. W. Strane, S. R. Lee, H. J. Stein, S. T. Picraux, J. K. Watanabe, and J. W. Mayer, J. Appl. Phys. 79, 637 (1996).