Studies of PLD-grown ZnO and MBE-grown GaP mosaic thin films by x-ray scattering methods: Beyond the restrictive ω rocking curve linewidth as a figure-of-merit

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7940, Issue , 2011, Pages

  Durand, O ^a   Letoublon, A ^a   Rogers, D J ^b   Teherani, F Hosseini ^b   Cornet, C ^a   Le Corre, A ^a  

^a UNIVERSITÉ EUROPÉENNE DE BRETAGNE   (France)

^b 8 Route de Chevreuse France   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIPHASE DOMAINS; CORRELATION LENGTHS; CRYSTALLINE DOMAINS; CRYSTALLOGRAPHIC ORIENTATIONS; FIGURE OF MERIT; FILM-SUBSTRATE INTERFACES; GENERIC APPROACH; HETEROGENEOUS SYSTEMS; HIGH RESOLUTION; LATERAL CORRELATION LENGTH; LONG RANGE CORRELATIONS; MISFIT DISLOCATIONS; NON DESTRUCTIVE TESTING; ROCKING CURVES; SI (001) SUBSTRATE; SI(0 0 1); STRUCTURAL CORRELATION; STRUCTURAL QUALITIES; TWO-COMPONENT; WILLIAMSON-HALL; ZNO; ZNO LAYERS;

DEFECT DENSITY; DEFECTS; EPITAXIAL FILMS; EPITAXIAL GROWTH; LATTICE MISMATCH; LINEWIDTH; MOLECULAR BEAM EPITAXY; MOLECULAR BEAMS; NONDESTRUCTIVE EXAMINATION; PULSED LASER DEPOSITION; SCATTERING; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SOIL STRUCTURE INTERACTIONS; SUBSTRATES; VAPOR DEPOSITION; X RAY SCATTERING; ZINC OXIDE;

GALLIUM ALLOYS;

EID: 79955072250     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.877661     Document Type: Conference Paper

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