Characterization of multilayered materials for optoelectronic components by high-resolution X-ray diffractometry and reflectometry: Contribution of numerical treatments

Thin Solid Films

Volumn 450, Issue 1, 2004, Pages 51-59

  Durand, O ^a  

^a THALES RESEARCH AND TECHNOLOGY   (France)

Author keywords

Fast Fourier transform; Opto electronic devices; Semi conductor hetero structures; Thickness determination; X Ray diffractometry; X Ray reflectometry

Indexed keywords

CARRIER CONCENTRATION; COMPUTER SIMULATION; CORRELATION METHODS; FAST FOURIER TRANSFORMS; HETEROJUNCTIONS; INFRARED DETECTORS; LASER BEAMS; OPTIMIZATION; SEMICONDUCTOR QUANTUM WELLS; THICKNESS MEASUREMENT; VECTORS; X RAY DIFFRACTION;

SEMI-CONDUCTOR HETERO STRUCTURES; THICKNESS DETERMINATION; X-RAY REFLECTOMETRY;

OPTOELECTRONIC DEVICES;

EID: 1142303868     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.10.052     Document Type: Conference Paper

References (24)

1. Vidal B., Vincent P. Appl. Opt. 23:1984;1794.
2. Kiessig H. Ann. Physik. 10:1931;769.
3. Daillant J., Gibaud A. X-Ray and Neutron Reflectivity: Principles and Applications. 1999;SpringerVerlag, Berlin, Heidelberg.
4. Russel T.P. Mater. Sci. Rep. 5:1990;171.
5. Li M., Möller M.O., Landwehr G. J. Appl. Phys. 80:1996;2788.
6. Smigiel E., Cornet A. J. Phys. D: Appl. Phys. 33:2000;1757.
7. Bridou et F., Pardo B. J. Phys. III France. 4:1994;1523.
8. Banerjee S., Sanyal M.K., Datta A., Kanakaraju S., Mohan S. Phys. Rev. B. 54:1996;16 377.
9. van der Lee A. Phys. IV Fr. 12:2002;Pr6-255.
10. Rakovska A., Berger V., Marcadet X., Vinter B., Glastre G., Oksenhendler T., Kaplan D. Appl. Phys. Lett. 77:2000;397.
11. Becker C., Prevot I., Marcadet X., Vinter B., Sirtori C. Appl. Phys. Lett. 78:2001;1029.
12. Faist J., Capasso F., Sirtori C., Sivco D.L., Baillargeon J.N., Hutchinson A.L., Chu S.-N.G., Cho A.Y. Appl. Phys. Lett. 68:1996;3680.
13. Prévot I., Marcadet X., Durand O., Bisaro R., Julien F.H. Opt. Mater. 17:2001;193.
14. Durand O., Berger V., Bisaro R., Bouchier A., De Rossi A., Marcadet X., Prévot I. Mater. Sci. Semicond. Processing. 4:2001;327.
15. X. Marcadet, I. Prévot, C. Becker, O. Durand, R. Bisaro, F.H. Julien, B. Vinter, C. Sirtori, In plane Semiconductor Lasers, in: L.J. Mawst, R.U. Martinelli, (Eds.), Proceedings of SPIE 4287 (2001) 23.
16. Jenichen B., Stepanov S.A., Brar B., Kroemer H. J. Appl. Phys. 79:1996;120.
17. Fiore A., Berger V., Rosencher E., Bravetti P., Nagle J. Lett. Nat. 391:1998;463.
18. Berger V., Fiore A., Bravetti P., Leo G., Yang C.O., Rosencher E., Nagle J. Recent Res. Dev. Appl. Phys. 2:1999;345.
19. Guha S., Agahi F., Pezeshki B., Kash J.A., Kisker D.W., Bojarczuk N.A. Appl. Phys Lett. 68:1996;906.
20. Takamori T., Takemasa K., Kamijoh T. Appl. Phys. Lett. 69:1996;659.
21. Sugg A.R., Holonyak N. Jr, Baker J.E., Kish F.A., Dallesasse J.M. Appl. Phys. Let. 58:1991;1199.
22. Fiore A., Berger V., Rosencher E., Laurent N., Theilmann S., Vodjdani N., Nagle J. Appl. Phys. Lett. 68:1996;1320.
23. Durand O., Wyckzisk F., Olivier J., Magis M., Galtier P., De Rossi A., Calligaro M., Ortiz V., Berger V., Leo G., Assanto G. Appl. Phys. Lett. 83:2002;2554.
24. High-Resolution X-ray scattering from Thin Films and Multilayers, in: V. Holý, U. Pietsch, T. Baumbach, (Eds.). Springer Tracts in Modem Physics, vol. 149, Berlin, Heidelberg (1998).