PZT transduced high-overtone width-extensional resonators above 1 GHz

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2009, Pages 2145-2148

  Chandrahalim, Hengky ^a   Bhave, Sunil A ^a   Polcawich, Ronald G ^b   Pulskamp, Jeffrey S ^b   Kaul, Roger ^b  

^a Cornell University   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL OSCILLATORS; LEAD ZIRCONATE TITANATE; MEMS; MICROELECTROMECHANICAL DEVICES; RESONATORS; SINGLE CRYSTALS;

FABRICATION TECHNIQUE; LATERAL DIMENSION; MOTIONAL IMPEDANCE; QUANTITATIVE COMPARISON; RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS; RESONANCE FREQUENCIES; SINGLE CRYSTAL SILICON; THEORETICAL MODELING;

SILICON WAFERS;

EID: 77952792388     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2009.5441468     Document Type: Conference Paper

References (5)

1. R. C. Ruby, A. Barfknecht, C. Han, Y. Desai, F. Geefay, G. Gan, M. Gat, and T. Verhoeven, "High-Q FBAR filters in a wafer-level chip-scale package," Digest of Technical Papers - IEEE International Solid-State Circuits Conference , pp. 184-185, (San Francisco, CA, United states), 2002.
2. G. Piazza, "Integrated aluminum nitride piezoelectric microelectromechanical system for radio front ends," Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 27(4), pp. 776-784, 2009.
3. J. D. Larson III, S. R. Gilbert, and B. Xu, "PZT Material properties at UHF and microwave frequencies derived from FBAR measurements," Proceedings - IEEE Ultrasonics Symposium 1, pp. 173-177, (Montreal, Que., Canada), 2004.
4. 3-on-silicon resonators," Applied Physics Letters 93(23), p. 233504, 2008.
5. G. K. Ho, R. Abdolvand, and F. Ayazi, "High-order composite bulk acoustic resonators," Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) , pp. 791-794, (Kobe, Japan), 2007.