Conductive Ga doped ZnO/Cu/Ga doped ZnO thin films prepared by magnetron sputtering at room temperature for flexible electronics

Thin Solid Films

Volumn 519, Issue 11, 2011, Pages 3870-3874

  Gong, Li ^a   Lu, Jianguo ^a   Ye, Zhizhen ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Magnetron sputtering; Multilayer; Polycarbonate; Transparent conductive oxides; Zinc oxide

Indexed keywords

DOPED ZNO; FIGURE OF MERIT; GA-DOPED; GA-DOPED ZNO; LAYER THICKNESS; NEAR INFRARED REFLECTIVITY; POLYCARBONATE SUBSTRATES; RESISTIVITY VALUES; ROOM TEMPERATURE; TRANSPARENT CONDUCTIVE OXIDES; WAVELENGTH RANGES;

CARRIER CONCENTRATION; CONDUCTIVE FILMS; ELECTRIC PROPERTIES; FILM PREPARATION; FLEXIBLE ELECTRONICS; GALLIUM; GALLIUM ALLOYS; MAGNETRON SPUTTERING; OPTICAL MULTILAYERS; OPTICAL PROPERTIES; ZINC; ZINC OXIDE;

MULTILAYERS;

EID: 79952738271     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.01.396     Document Type: Article

References (41)

1. T.L. Yang, D.H. Zhang, J. Ma, H.L. Ma, and Y. Chen Thin Solid Films 326 1998 60
2. C.S. Moon, Y.M. Chung, W.S. Jung, and J.G. Han Surf. Coat. Technol. 201 2007 5035
3. O. Bamiduro, H. Mustafa, R. Mundle, R.B. Konda, and A.K. Pradhan Appl. Phys. Lett. 90 2007 252108-1
4. D.H. Zhang, T.L. Yang, J. Ma, Q.P. Wang, R.W. Gao, and H.L. Ma Appl. Surf. Sci. 158 2000 43
5. E. Fortunato, P. Nunes, D. Costa, D. Brida, I. Ferreira, and R. Martins Vacuum 64 2002 233
6. E. Fortunato, P. Nunes, A. Marques, D. Costa, H. Aguas, I. Ferreira, M.E.V. Costa, M.H. Godinaho, P.L. Almeida, J.P. Borges, and R. Martins Surf. Coat. Technol. 151-152 2002 247
7. E. Fortunato, A. Goncalves, V. Assuncao, A. Marques, H. Aguas, L. Pereira, I. Ferreira, and R. Martins Thin Solid Films 442 2003 121
8. A. Miyake, T. Yamada, H. Makino, N. Yamamoto, and T. Yamamoto Thin Solid Films 517 2008 1037
9. A. Lambertz, C. Roβ, H. Siekmann, G. Stollwerk, and F. Finger Proceedings of the 21st European Photovoltaic Solar Energy Conference (21st EU-PVSEC), Dresden, Germany 2006 1771
10. O. Nakagawara, Y. Kishimoto, K. Seto, Y. Koshido, Y. Yoshino, and T. Makino Appl. Phys. Lett. 89 2006 091904-1
11. V. Bhosle, A. Tiwari, and J. Narayan Appl. Phys. Lett. 88 2006 032106-1
12. X.H. Yu, J. Ma, F. Ji, Y.H. Wang, C.F. Cheng, and H.L. Ma Appl. Surf. Sci. 245 2005 310
13. V. Assuncao, E. Fortunato, and A. Marques Thin Solid Films 442 2003 102
14. Q.B. Ma, Z.Z. Ye, H.P. He, L.P. Zhu, J.Y. Huang, Y.Z. Zhang, and B.H. Zhao Scr. Mater. 58 2008 21
15. S. Kim, W.I. Lee, E.H. Lee, S.K. Hwang, and C. Lee J. Mater. Sci. 42 2007 4845
16. V. Assuncao, E. Fortunato, A. Marques, H. Aguas, I. Ferreira, M.E.V. Costa, and R. Martins Thin Solid Films 427 2003 401
17. A. Suzuki, T. Matsushita, T. Aoki, Y. Yoneyama, and M. Okuda Jpn. J. Appl. Phys. 38 1999 L71
18. B. Sang, K. Kushiya, D. Okumura, and O. Yamase Sol. Energy Mater. Sol. Cells 67 2001 237
19. K.T.R. Reddy, T.B.S. Reddy, I. Forbes, and R.W. Miles Surf. Coat. Technol. 151-152 2002 110
20. G. Leftheriotis, S. Papaefthiniou, and P. Yianoulis Solid State Ionics 136-137 2000 655
21. A. Kloppel, B. Meyer, and J. Trube Thin Solid Films 392 2001 311
22. A. Kloppel, W. Kriegseis, B.K. Meyer, A. Scharmann, C. Daube, J. Stollenwerk, and J. Trube Thin Solid Films 365 2000 139
23. M. Sawada, M. Higuchi, S. Kondo, and H. Saka Jpn. J. Appl. Phys. 40 2001 3332
24. Y.S. Jung, Y.W. Choi, H.C. Lee, and D.W. Lee Thin Solid Films 440 2003 278
25. D.R. Sahu, S.Y. Lin, and J.L. Huang Appl. Surf. Sci. 252 2006 7509
26. D.R. Sahu, and J.L. Huang Sol. Energy Mater. Sol. Cells 93 2009 1923
27. D.R. Sahu, and J.L. Huang Appl. Surf. Sci. 253 2006 915
28. D.R. Sahu, and J.L. Huang Appl. Surf. Sci. 253 2006 827
29. H.K. Park, J.W. Kang, S.I. Na, D.Y. Kim, and H.K. Kim Sol. Energy Mater. Sol. Cells 93 2009 1994
30. H.K. Park, J.A. Jeong, Y.S. Park, S.I. Na, D.Y. Kim, and H.K. Kim Electrochem. Solid-State Lett. 12 8 2009 H309
31. H. Han, N.D. Theodore, and T.L. Alford J. Appl. Phys. 103 2008 013708-1
32. K. Sivaramakrishnan, and T.L. Alford Appl. Phys. Lett. 94 2009 052104-1
33. K. Sivaramakrishnan, N.D. Theodore, J.F. Moulder, and T.L. Alford J. Appl. Phys. 106 2009 063510-1
34. D.R. Cairns, D.C. Paine, and G.P. Crawford SID'01 Digest 2001 654
35. B.T. Lee, T.H. Kim, and S.H. Jeong J. Phys. D: Appl. Phys. 39 2006 957
36. G.Z. Xing, B. Yao, C.X. Cong, T. Yang, Y.P. Xie, B.H. Li, and D.Z. Shen J. Alloys Compd. 457 2008 36
37. V. Dose, W. Altmann, A. Goldmann, U. Kolac, and J. Rogozik Phys. Rev. Lett. 52 1984 1919
38. Y.W. Zhu, H.Z. Zhang, X.C. Sun, S.Q. Feng, J. Xu, Q. Zhao, B. Xiang, R.M. Wang, and D.P. Yu Appl. Phys. Lett. 83 2003 144
39. G. Haacke J. Appl. Phys. 47 1976 4086
40. A. Indluru, and T.L. Alford J. Appl. Phys. 105 2009 123528-1
41. G. Fowles Introduction to Modern Optics 2nd Edition 1989 Dover Publications New York