Transparent, conductive ZnO:Al thin film deposited on polymer substrates by RF magnetron sputtering

Surface and Coatings Technology

Volumn 151-152, Issue , 2002, Pages 247-251

  Fortunato, E ^a   Nunes, P ^a   Marques, A ^a   Costa, D ^a   Aguas H ^a   Ferreira, I ^a   Costa, M E V ^b   Godinho, M H ^a   Almeida, P L ^a   Borges, J P ^a   Martins, R ^a  

^a DEPARTAMENTO DE CIÊNCIA DOS MATERIAIS   (Portugal)

^b UNIVERSITY OF AVEIRO   (Portugal)

Author keywords

Mechanical properties; Polymeric substrates; RF magnetron sputtering; Zinc oxide thin film

Indexed keywords

ALUMINUM COMPOUNDS; DOPING (ADDITIVES); MAGNETRON SPUTTERING; POLYMERS; STRAIN; ZINC OXIDE;

TENSILE STRAIN;

THIN FILMS;

ALUMINUM; FILM; SPUTTERING; ZINC OXIDE;

EID: 8344229317     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01660-7     Document Type: Article

References (11)