Effect of substrate temperature on structural, electrical and optical properties of Ga-doped ZnO films on cycro olefin polymer substrate by ion plating deposition

Thin Solid Films

Volumn 517, Issue 3, 2008, Pages 1037-1041

  Miyake, Aki ^a   Yamada, Takahiro ^a   Makino, Hisao ^a   Yamamoto, Naoki ^a   Yamamoto, Tetsuya ^a  

^a KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

COP; GZO; TCO; ZnO

Indexed keywords

ABS RESINS; CONDUCTING POLYMERS; CONDUCTIVE FILMS; ELECTRIC DISCHARGES; GALLIUM ALLOYS; GLASS; ION IMPLANTATION; OLEFINS; OPTICAL GLASS; OPTICAL MATERIALS; OPTICAL PROPERTIES; PLASMAS; PLATING; POLYMER FILMS; POLYMERIC GLASS; POLYMERS; SEMICONDUCTING ZINC COMPOUNDS; ZINC ALLOYS; ZINC OXIDE;

ARC DISCHARGES; COP; ELECTRICAL AND OPTICAL PROPERTIES; GLASS SUBSTRATES; GZO; ION PLATINGS; OLEFIN POLYMERS; PLASMA EXPOSURE TIMES; SUBSTRATE TEMPERATURES; TCO; ZNO; ZNO FILMS;

SUBSTRATES;

EID: 56649105239     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.06.052     Document Type: Article

References (7)

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