Preparation of transparent conducting ZnO:Al films on polymer substrates by r. f. magnetron sputtering

Applied Surface Science

Volumn 158, Issue 1, 2000, Pages 43-48

  Zhang, D H ^a   Yang, T L ^b   Ma, J ^a   Wang, Q P ^a   Gao, R W ^a   Ma, H L ^a  

^a SHANDONG UNIVERSITY   (China)

^b Zibo University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CARRIER CONCENTRATION; CARRIER MOBILITY; ELECTRIC CONDUCTIVITY; FILM PREPARATION; MAGNETRON SPUTTERING; ORGANIC POLYMERS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DOPING; SUBSTRATES; TEMPERATURE; ZINC OXIDE;

POLYISOCYANATE; POLYPROPYLENE ADIPATE; TRANSPARENT CONDUCTING FILMS;

CONDUCTIVE FILMS;

EID: 0033716385     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00591-7     Document Type: Article

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