Transparent conducting ZnO:Al films deposited on organic substrates deposited by r.f. magnetron-sputtering

Thin Solid Films

Volumn 326, Issue 1-2, 1998, Pages 60-62

  Yang, T L ^a   Zhang, D H ^a   Ma, J ^a   Ma, H L ^a   Chen, Y ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

Magnetron sputtering; Organic substrates; ZnO:Al films

Indexed keywords

ALUMINUM; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; ORGANIC COMPOUNDS; SUBSTRATES; TRANSPARENCY; ZINC OXIDE;

ORGANIC SUBSTRATES; TRANSPARENT FILMS;

CONDUCTIVE FILMS;

EID: 0032482906     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00763-9     Document Type: Article

References (6)

1. J. Ma, S.Y. Li, J.Q. Zhao, H.L. Ma, Thin Solid Films 307 (1997) 200.
2. A. Mansingh, C.V.R. Vasant Kumar, Thin Solid Films L11 (1988) 167.
3. T. Karasawa, Y. Miyata, Thin Solid Films 223 (1993) 135.
4. W.S. Lan, S.J. Fonash, J. Electron. Mater. 16 (1987) 141.
5. D.H. Zhang, D.E. Brodie, Thin Solid Films 251 (1994) 151.
6. D.H. Zhang, H.L. Ma, Appl. Phys. A 62 (1996) 4.