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Thin Solid Films

Volumn 519, Issue 11, 2011, Pages 3663-3668

Low temperature chemical vapor deposition of nanocrystalline V 2O5 thin films

(2) Nandakumar, Navaneetha Krishnan a Seebauer, Edmund G a

a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN (United States)

Author keywords

Amorphous; Chemical vapor deposition; Nanocrystalline; Vanadia; Vanadium pentoxide

Indexed keywords

AMORPHOUS; CHEMICAL VAPOR; NANOCRYSTALLINE; VANADIA; VANADIUM PENTOXIDE;

CARBON FILMS; DEPOSITION; THIN FILMS; VANADIUM; VANADIUM ALLOYS; VANADIUM COMPOUNDS; WATER VAPOR;

CHEMICAL VAPOR DEPOSITION;

EID: 79952737297 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.02.002 Document Type: Article

Times cited : (39)

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