Thin-film growth dynamics with shadowing and re-emission effects

Journal of Nanomechanics and Micromechanics

Volumn 5, Issue 1, 2011, Pages

  Karabacak, Tansel ^a  

^a Department of Applied Science ^*  (United States)

Author keywords

Growth dynamics; Growth exponent; Re emission effect; Resputtering; Scaling exponents; Shadowing effect; Simulations; Surface roughness; Thin film growth modeling

Indexed keywords

GROWTH DYNAMICS; GROWTH EXPONENT; RE-EMISSION EFFECT; RE-SPUTTERING; SCALING EXPONENTS; SHADOWING EFFECT; SIMULATIONS; THIN-FILM GROWTH MODELING; RE-EMISSION; SCALING EXPONENT; SHADOWING EFFECTS; THIN FILM GROWTH MODELS;

ATOMS; COMPUTER SIMULATION; DIFFUSION IN SOLIDS; DYNAMICS; METAL ANALYSIS; MONTE CARLO METHODS; RHENIUM; SURFACE DIFFUSION; SURFACE PROPERTIES; SURFACE ROUGHNESS; INTELLIGENT SYSTEMS; THIN FILMS;

FILM GROWTH;

EID: 79952576815     PISSN: 21535434     EISSN: 21535477     Source Type: Journal    
DOI: 10.1117/1.3543822     Document Type: Article

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