Influence of sticking coefficients on the behavior of sputtered atoms in an argon glow discharge: Modeling and comparison with experiment

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2400-2410

  Bogaerts, A ^a   Naylor, J ^b   Hatcher, M ^b   Jones, W J ^b   Mason, R ^b  

^a UNIVERSITY OF ANTWERP   (Belgium)

^b SWANSEA UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032355956     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581359     Document Type: Review

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