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Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 79, Issue 5, 2009, Pages

Effects of substrate rotation in oblique-incidence metal(100) epitaxial growth

(4) Shim, Yunsic a Mills, Mary E a,b Borovikov, Valery a Amar, Jacques G a

a UNIVERSITY OF TOLEDO (United States)

b 931 College Mall (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BALLISTIC DEPOSITION; DEPOSITION ANGLE; FEATURE SIZES; FINITE ROTATIONS; KINETIC MONTE CARLO SIMULATION; MAIN EFFECT; ROTATION LEADS; ROTATION RATE; SIMPLIFIED MODELS; SUBSTRATE ROTATION;

BALLISTICS; EPITAXIAL GROWTH; METAL ANALYSIS; MOLECULAR BEAM EPITAXY; MONTE CARLO METHODS; MORPHOLOGY; PHOTORESISTS; ROTATION; SUBSTRATES; SURFACE PROPERTIES; SURFACE ROUGHNESS;

SURFACE MORPHOLOGY;

EID: 67650163891 PISSN: 15393755 EISSN: 15502376 Source Type: Journal
DOI: 10.1103/PhysRevE.79.051604 Document Type: Article

Times cited : (13)

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