Competitive growth mechanisms of aluminum nitride thin films deposited by off-normal reactive magnetron sputtering

Journal of Applied Physics

Volumn 103, Issue 8, 2008, Pages

  Deniz, D ^a   Karabacak, T ^b   Harper, J M E ^a  

^a University of New Hampshire   (United States)

^b University of Arkansas at Little Rock ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; MAGNETRON SPUTTERING; MONTE CARLO METHODS; REACTIVE SPUTTERING; SUBSTRATES;

ADATOM MOBILITIES; ALUMINUM NITRIDE THIN FILMS; SURFACE MOBILITIES;

THIN FILMS;

EID: 43049110615     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2917063     Document Type: Article

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