TOPSPOT - a new method for the fabrication of microarrays

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 317-322

  Ducree, Jens ^a   Gruhler, Holger ^a   Hey, Nicolaus ^a   Mueller, Martin ^a   Bekesi, Stefan ^a   Freygang, Michael ^a   Sandmaier, Hermann ^a   Zengerle, Roland ^a  

^a Institute for Micromachining and Information Technology   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; NOZZLES; PRESSURE EFFECTS;

MICROARRAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033721842     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)