Multilayer Laue lens: A path toward one nanometer X-ray focusing

X-Ray Optics and Instrumentation

Volumn 2010, Issue , 2010, Pages

  Yan, Hanfei ^a,b   Kang, Hyon Chol ^a,c   Conley, Ray ^b,d   Liu, Chian ^d   MacRander, Albert T ^d   Stephenson, G Brian ^a   Maser, Jörg ^a,c  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

^c Chosun University   (South Korea)

^d ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 79251541473     PISSN: 16877632     EISSN: 16877640     Source Type: Journal    
DOI: 10.1155/2010/401854     Document Type: Review

References (37)

1. Weckhuysen B. M., Chemical imaging of spatial heterogeneities in catalytic solids at different length and time scales Angewandte Chemie-International Edition 2009 48 27 4910 4943
2. Mimura H., Yumoto H., Matsuyama S., Sano Y., Yamamura K., Mori Y., Yabashi M., Nishino Y., Tamasaku K., Ishikawa T., Yamauchi K., Efficient focusing of hard x rays to 25 nm by a total reflection mirror Applied Physics Letters 2007 90 5 3
3. Chao W., Harteneck B. D., Liddle J. A., Anderson E. H., Attwood D. T., Soft X-Ray microscopy at a spatial resolution better than 15 nm Nature 2005 435 7046 1210 1213
4. Schroer C. G., Kurapova O., Patommel J., Boye P., Feldkamp J., Lengeler B., Burghammer M., Riekel C., Vincze L., Van Der Hart A., Kchler M., Hard X-Ray nanoprobe based on refractive X-Ray lenses Applied Physics Letters 2005 87 12 3
5. Mimura H., Handa S., Kimura T., Yumoto H., Yamakawa D., Yokoyama H., Matsuyama S., Inagaki K., Yamamura K., Sano Y., Tamasaku K., Nishino Y., Yabashi M., Ishikawa T., Yamauchi K., Breaking the 10 nm barrier in hard-X-Ray focusing Nature Physics 2010 6 2 122 125
6. Kang H. C., Maser J., Stephenson G. B., Liu C., Conley R., MacRander A. T., Vogt S., Nanometer linear focusing of hard X Rays by a multilayer laue lens Physical Review Letters 2006 96 12 4
7. Macrander A. T., Yan H., Kang H. C., Nanofocusing of hard X-Rays with multilayer Laue lenses Hand Book of Optics 2009 5 New York, NY, USA McGrawHill
8. Liu C., Conley R., MacRander A. T., Maser J., Kang H. C., Zurbuchen M. A., Stephenson G. B., Depth-graded multilayers for application in transmission geometry as linear zone plates Journal of Applied Physics 2005 98 11 6
9. Kang H. C., Yan H., Winarski R. P., Holt M. V., Maser J., Liu C., Conley R., Vogt S., MacRander A. T., Stephenson G. B., Focusing of hard X-Rays to 16 nanometers with a multilayer Laue lens Applied Physics Letters 2008 92 22 3
10. Maser J., Stephenson G. B., Vogt S., Yun W., Macrander A., Kang H. C., Liu C., Conley R., Multilayer Laue lenses as high-resolution X-Ray optics 5539 Design and Microfabrication of Novel X-Ray Optics II August 2004 Denver, Colo, USA Proceedings of SPIE
11. Kirz J., Phase zone plates for X Rays and the extreme uv Journal of the Optical Society of America 1974 64 3 301 309
12. Kang H. C., Stephenson G. B., Liu C., Conley R., MacRander A. T., Maser J., Bajt S., Chapman H. N., High-efficiency diffractive X-Ray optics from sectioned multilayers Applied Physics Letters 2005 86 15 3
13. Maser J., Schmahl G., Coupled wave description of the diffraction by zone plates with high aspect ratios Optics Communications 1992 89 24 355 362
14. Levashov V. E., Vinogradov A. V., Analytical theory of zone plate efficiency Physical Review E 1994 49 6 5797 5803
15. Kurokhtin A. N., Popov A. V., Simulation of high-resolution X-Ray zone plates Journal of the Optical Society of America A 2002 19 2 315 324
16. Schroer C. G., Focusing hard X Rays to nanometer dimensions using Fresnel zone plates Physical Review B 2006 74 3 4
17. Pfeiffer F., David C., van der Veen J. F., Bergemann C., Nanometer focusing properties of Fresnel zone plates described by dynamical diffraction theory Physical Review B 2006 73 24
18. Yan H., Maser J., Macrander A., Shen Q., Vogt S., Stephenson G. B., Kang H. C., Takagi-Taupin description of X-Ray dynamical diffraction from diffractive optics with large numerical aperture Physical Review B 2007 76 11 13
19. Spiller E., Soft X-Ray Optics 1994 Bellingham, Wash, USA SPIE Optical Engineering Press
20. Yan H., Kang H. C., Maser J., Macrander A. T., Kewish C. M., Liu C., Conley R., Stephenson G. B., Characterization of a multilayer Laue lens with imperfections Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2007 582 1 126 128
21. Yan H., X-Ray dynamical diffraction from multilayer Laue lenses with rough interfaces Physical Review B 2009 79 16 12
22. Conley R., Liu C., Kewish C. M., Macrander A. T., Morawe C., Multilayer growth in the APS rotary deposition system 6705 Advances in X-Ray/EUV Optics and Components II September 2007 San Diego, Calif, USA Proceedings of SPIE
23. http://www.msi-pse.com/Polaris.htm
24. Liu C., Conley R., Macrander A. T., Film stress studies and the multilayer Laue lens project 6317 Advances in X-Ray/EUV Optics, Components, and Applications August 2006 San Diego, Calif, USA Proceedings of SPIE
25. Wang Y. P., Zhou H., Zhou L., Headrick R.L., Macrander A.T., Ozcan A.S., Interface roughness evolution in sputtered WSi2 /Si multilayers Journal of Applied Physics 2007 101 2 6
26. Koyama T., Tsuji T., Takano H., Kagoshima Y., Ichimaru S., Ohchi T., Takenaka H., Performance test of Mo/Si and Mosi2 /Si multilayer Laue lenses Journal of Physics: Conference Series 2009 186 1
27. Koyama T., Ichimaru S., Tsuji T., Takano H., Kagoshima Y., Ohchi T., Takenaka H., Optical properties of MoSi2/Si multilayer laue lens as nanometer X-Ray focusing device Applied Physics Express 2008 1 11 3
28. Conley R., Liu C., Qian J., Kewish C. M., MacRander A. T., Yan H., Kang H. C., Maser J., Stephenson G. B., Wedged multilayer Laue lens Review of Scientific Instruments 2008 79 5 4
29. Jahedi N., Conley R., Shi B., Qian J., Lauer K., Macrander A., Metrology of multilayer Laue lens structures by means of scanning electron microscope imaging Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2010 616 2-3 89 92
30. Kang H. C., Stephenson G. B., Liu C., Conley R., Khachatryan R., Wieczorek M., MacRander A. T., Yan H., Maser J., Hiller J., Koritala R., Sectioning of multilayers to make a multilayer Laue lens Review of Scientific Instruments 2007 78 4 3
31. Conley R., Boueta N., Biancarosaa J., Shena Q., Boasb L., Feracab J., Rosenbaum L., The NSLS-II multilayer laue lens deposition system 7448 Advances in X-Ray/EUV Optics and Components IV August 2009 San Diego, Calif, USA Proceedings of SPIE
32. Authier A., Dynamical Theory of X-ray Diffraction 2002 Oxford, UK Oxford University Press
33. NSLS-II conceptual report, http://www.bnl.gov/nsls2/project/
34. Yan H., Maser J., Kang H. C., Macrander A., Stephenson B., A theoretical study of two-dimensional point focusing by two multilayer Laue lenses 7077 Advances in X-Ray/EUV Optics and Components III August 2008 San Diego, Calif, USA Proceedings of SPIE
35. Shu D., Yan H., Maser J. M.,. in Proceedings of SRI-2008 (to be published in Nucl. Instrum. Methods A)
36. Shu D., Yan H., Maser J. M.,. USA Patent No. 7597475
37. Yan H., Rose V., Shu D.,. submitted