Film stress studies and the multilayer Laue lens project

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6317, Issue , 2006, Pages

  Liu, Chian ^a   Conley, R ^a   Macrander, A T ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

Film stress; Multilayers; Sputter deposition; Thin films

Indexed keywords

FILM STRESSES; MO/SI; STYLUS PROFILERS; WSI2;

ADHESION; DIFFRACTION GRATINGS; MULTILAYERS; SPUTTER DEPOSITION; STRESSES; THICKNESS MEASUREMENT; THIN FILMS; X RAYS;

LENSES;

EID: 33750584076     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.687074     Document Type: Conference Paper

References (16)

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